Ulvac DIS-90, Instruction Manual

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4. Operation
Be sure to use the procedure below to start up or shut down the pump.
・
When you do not use air-flush device,
proceed 4.1 Air-flush closed operation [page 20].
・
When you use air-flush device,
proceed 4.2 Air-flush opened operation [page 21].
WARNING
Danger of explosion and ignition
Do not evacuate gas which is hazardous to humans or explosive, flammable, or
corrosive. Do not evacuate with substances containing chemicals, solvents, and
powders.
If done, it can cause failure or bodily injury by gas, explosion or ignition.
※
When evacuating vapor, operate in accordance with 4.2 [page 21].
Never evacuate
hazardous gas
Danger of entanglement and foreign matter dispersal
Never put finger or foreign matter into air hole of fan cover, air hole of motor or
clearance between FS(1) and FS(2) cooling fins.
If done, it can cause bodily injury from entanglement with turning section, or foreign
matter dispersal.
Avoid foreign matter
Danger of electric shock and entanglement
Do not remove or alter safeguards or insulation parts.
If done, it can cause bodily injury from electric shock or turning section and it can cause
deteriorated performance and operating lifetime, and invalidate guarantee.
Never alter
Danger of failure and bodily injury
Change air-flush port only after vacuum pump is stopped.
If you change it during vacuum pump operation, it can cause vacuum pump failure and
bodily injury.
Change after
vacuum pump is
stopped
Finger, foreign matter
Air hole of fan cover
Clearance between FS(1) and FS(2) cooling fins
Air hole of motor
Finger, foreign matter