Ulvac DIS-90 Instruction Manual Download Page 11 | Manualshive

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Hour Counter

Fan Cover

Motor

Turning Direction Plate

Inlet NW25

Outlet NW16

Air Flush Port (Rc 1/8)
(It is closed by plug when shipping from factory.)

Handle

2. Name and structure of each section

Structure of vacuum pump

Fixed Scroll

FS(1)

Fixed Scroll

FS(2)

Orbiting Scroll

OS

Cooling Fan

Cooling Fan

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Summary of Contents for DIS-90

Page 1: ...sold it to you Purchase date When you began operation This instruction manual includes very important warnings cautions and operating procedure in order to operate this pump safely and efficiently Be...

Page 2: ...ve the following meanings Examples of marks WARNING Indicates a potentially hazardous situation which if not avoided may result in serious injury or loss of life CAUTION Indicates a potentially hazard...

Page 3: ...quipment is not stopped in an emergency it can cause accident fire or failure Install emergency stop switch Danger of accident fire or failure Be sure to install an electric source emergency stop swit...

Page 4: ...one it can cause bodily injury from entanglement with turning section or foreign matter dispersal Never alter Danger of electric shock and entanglement Do not remove or alter safeguards or insulation...

Page 5: ...e and failure Ifprotectivedeviceorthermalprotectoractivates besuretoturnoffelectricsourceandinspect causestosolvetheproblem Donotoperateuntilproblemissolved Operationwhileproblemisleftunsolvedcan caus...

Page 6: ...ess than 9L min If not it can increase pressure inside vacuum pump resulting in failure Caution for frequent start stop and short interval Risk of motor malfunction Refrain from frequent start stop op...

Page 7: ...stickers Always keep warning stickers clean and legible If they become dirty or detached replace them with new ones If you need replacement stickers contact our sales branches who sold the vacuum pump...

Page 8: ...p 20 4 1 2 Shut down 20 4 2 Air flush opened operation 21 4 2 1 Preparation 21 4 2 2 Start up and shut down 22 4 2 3 When returning to air flush closed operation 22 5 Maintenance and inspection 23 5 1...

Page 9: ...is any damage contact either our sales branches who sold it to you or local sales offices Check the following accessories Instruction manual this one Air muffler for air flush Which is attached to han...

Page 10: ...DIS 90 mass 14kgs firmly when installing vacuum pump If not it can cause damage failure or bodily injury from falling vacuum pump or by being caught between vacuum pump and other material Be careful a...

Page 11: ...n Plate Inlet NW25 Outlet NW16 Air Flush Port Rc 1 8 It is closed by plug when shipping from factory Handle 2 Name and structure of each section Structure of vacuum pump Fixed Scroll FS 1 Fixed Scroll...

Page 12: ...accident failure or bodily injury such as burns since this vacuum pump is an air cooled type Necessary ventilated air volume DIS 90 Over 2 m 3 min Pay attention to ventilation Danger of dust Be sure s...

Page 13: ...If you have any questions about the selection of protective devices contact either our sales branches who sold it to you or local sales offices Install motor protective circuit breaker to protect mot...

Page 14: ...ation according to EN60947 2 and is equipped with an operating handle which is lockable in OFF position and complies with the other requirements of EN60204 1 clause 5 3 CAUTION Motor burnout Before do...

Page 15: ...3 0 100 60 2 5 115 60 2 5 200 50 1 5 200 60 1 3 230 50 1 9 230 60 1 3 Activate the emergency stop by electric source switch or protective device Avoid motor burnout by protective device chart 1 Use r...

Page 16: ...200V connection by changing terminal plate 2pcs It is wired to 200V when shipping from factory If you want to change to a 100V connection remove M4 nut of electric source terminal and change terminal...

Page 17: ...atter into an inlet Foreign matter entering inlet can cause failure Prevent foreign matter from entering Test operation Open inlet and outlet Remove blank flanges 2 places from inlet and outlet of vac...

Page 18: ...t the drawback of debris inside pump into the vacuum chamber during power failure Use the clean connecting pipe between vacuum chamber and vacuum pump We recommend the use of a flexible tube between i...

Page 19: ...ut finger or foreign matter into air hole of fan cover air hole of motor or clearance between FS 1 and FS 2 cooling fins If done it can cause bodily injury from entanglement with turning section or fo...

Page 20: ...peration for at least one hour If you close air flush port or stop vacuum pump soon after evacuating vapor condensed water will remain inside vacuum pump which will cause failure Caution after exhaust...

Page 21: ...ot it can cause failure When doing air flush opened operation Noise level will increase by 7 8dB Install pump in an area which is not exposed to debris such as iron powder stone powder polish powder o...

Page 22: ...g vapor You must shorten maintenance interval 5 2 page 24 when evacuating vapor since vapor temperature disposal volume disposal frequency and substances in vapor have an influence on pump operation W...

Page 23: ...n valve between vacuum pump and vacuum chamber during pump shut down If vacuum pump stops during air flush opened operation atmospheric air is drawn back from air flush port to inside of vacuum pump a...

Page 24: ...maintenance and inspection after you turn off electric source If not it can cause bodily injury from electric shock or turning object Turn off electric source Danger of accident failure and shorter op...

Page 25: ...aning Inside cleaning Inside cleaning Replace Replace if something goes wrong Note 1 Maintenance interval should be shorter than either the period or operating hours Note 2 When you want further maint...

Page 26: ...aust piping diameter and length Air outlet is clogged Remove blank flange from exhaust outlet Motor protection gear activates Air outlet is clogged Reset thermal protector Inspect and repair Ultimate...

Page 27: ...speed and ultimate pressure should remain the same whether air flush system is used or not Note 2 Maximum voltage allowance is or 10 from motor rating Note 3 Noise level is measured at ultimate press...

Page 28: ...27 8 2 Dimensions...

Page 29: ...28 8 3 Performance data Inlet Pressure Pa Pumping Speed L min...

Page 30: ...29 Memo...

Page 31: ...mp Therefore any damage to the other products caused by a malfunction of this vacuum pump shall not be covered by the warranty This warranty is valid only in Japan 9 2 After sales and service Periodic...

Page 32: ...ring Trouble situation Unusual sound Pressure degradation Irregular action Others Purpose of the usage Device s name if necessary Evacuated gas Type of the gas Hazardous situations for injury Yes No T...

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