Ulvac DIS-90, Instruction Manual

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4.2 Air-flush opened operation
This pump is equipped with air-flush port. Before evacuating vapor, read precautions
below completely and be sure to understand the contents.
Purpose of air-flush
Evacuating moisture or humid gas by vacuum pump can cause condensed water to
remain in pump. This remaining water can cause failure of ultimate pressure or pump.
Air-flush opened operation is necessary to exhaust the remaining water inside.
Air-flush opened operation does not only exhaust moisture but also restores ultimate
pressure.
Important
Maintenance interval of this pump is based on clean gas applications The standard differs
when evacuating vapor.
You must shorten maintenance interval (5.2[page 24]) when evacuating vapor since vapor temperature, disposal
volume, disposal frequency and substances in vapor have an influence on pump operation. When evacuating
vapor, pay attention to all WARNING, CAUTION and Important notes (4 [page 18~19]).
4.2.1 Preparation
Before starting air-flush opened operation, first stop vacuum pump and proceed in
accordance with the following procedure. Never try to do air-flush opened operation
during operation.
Fit air-muffler
①
Stop vacuum pump.
②
Remove plug from air-flush port with a spanner (nominal dia. 13mm).
③
Lightly fit the attached air-muffler to air-flush port.
※
Store the removed plug and do not misplace it.
※
Vapor disposal volume is max. 5g/day, when doing air-flush opened operation(ambient
temperature25
℃
, humidity 60%RH).
Remove plug
Fit air-muffler
Air-flush port