Ulvac DIS-90, Instruction Manual

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Important information
Be sure to read this instruction manual to understand how to operate equipment
correctly. Only operators, who fully understand warnings, cautions and instructions,
are to operate the equipment. Improper operation (mishandling) can cause serious
bodily injury, death, fire or explosion.
Store this manual in a convenient place for immediate and future reference.
◆
Regarding safety
・ The safety instructions given in this manual are the minimum operating requirements.
Follow all national or municipal laws and regulations pertaining to fire, electricity, and
other safety regulations, as well as corporate regulations.
・
Pay special attention to items which are shown by the below marks and symbols.
・ Symbols and marks have the following meanings.
Examples of marks
WARNING
Indicates a potentially hazardous situation which, if not
avoided, may result in serious injury or loss of life.
CAUTION
Indicates a potentially hazardous situation which, if not
avoided, may result in minor or moderate injury or property
damage.
Examples of symbols
Indicates [Beware]. We will explain briefly in or near the symbol.
(The example on the left is [Beware of electric shock]).
Indicates [Prohibited action]. We will explain briefly in or near the symbol.
(The example on the left is [Do not touch]).
Indicates [Required action]. We will explain briefly in or near the symbol.
(The example on the left is [Be sure to ground]).
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We shall not be responsible for any injury or damage caused by disregard of
warnings, cautions or instructions.
Supplementary notes
Important
Indicates notes which we ask you to observe. They are helpful to
achieve full performance and functionality of the equipment.