Ulvac DIS-90, Instruction Manual

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-5-
For safe operation
CAUTION
Bew are
temperat ure
of intake gas
Danger of exceeding permissible
temperature of intake gas
If intake gas temperature is over 50
℃
, be
sure to install a chiller or trap
between vacuum pump and vacuum
chamber so that gas intake temperature of
vacuum pump keeps below 50
℃
.
If not, vacuum pump temperature can
increase, resulting in failure.
Operate while
opening air-flush
port
Danger of remaining moisture
When evacuating moisture, be sure to
open air-flush port (air-flush opened
operation).
If you evacuate vapor while air-flush port
is closed, condensed water will remain
inside vacuum pump and cause failure.
Caution after
exhausting vapor
Danger of insufficient vapor
exhaust
After evacuating vapor, do air-flush
opened operation for at least one hour.
If you close air-flush port or stop vacuum
pump soon after evacuating vapor,
condensed water will remain inside
vacuum pump which will cause failure.
Beware of intake
gas volume
Danger of exceeding permissible
intake gas volume
When sending N
2
gas or dry air into
air-flush port, pressure should be the
same as atmospheric pressure and flow
rate should be less than 9L/min.
If not, it can increase pressure inside
vacuum pump, resulting in failure.
Caution for
frequent
start/stop and
short interval
Risk of motor malfunction
Refrain from frequent start/stop operation.
It induces malfunction of motor such as
burn out.
Please consult your distributor or factory
representative for details.
Appropriate operating mode with
adequate interval and frequency of
start/stop is varies owing to operating
condition.
Disposal
Dispose the pump and removed
components safely in accordance with all
national/local safety and environmental
requirements.
Particular care must be taken with the
pump and components that have been
contaminated with dangerous substances
from the process.
Disposal of
the time counter
Never dump the time counter into the fire
since the lithium battery is installed.
Dispose the time counter according with
your national/local safety and
environmental requirements.
Disposal of the
lithium battery in
the time counter
Dispose the lithium battery itself in the
time counter according with your
national/local safety and environmental
requirements.
Never dump the lithium battery into the
fire.
Dispose the battery covering the terminal
(+,-) with insulating adhesive taps in order
to avoid contact with other metallic
materials which might occurs heat
generation, explosion and ignition.