Ulvac DIS-90, Instruction Manual

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5.2 Maintenance
When maintenance interval has elapsed, be sure to contact our distributor who sold it
to you. This vacuum pump requires maintenance conducted only by our authorized
specialist. Never try to disassemble, reassemble or alter on user’s side. We are not
responsible for any accidents caused by disassembly, reassembly or alteration which
was done by the user or non-specialist.
The following parts are consumable and need to be replaced periodically.
Whenever something goes wrong with them, replace them immediately.
W h e r e t o i n s p e c t
Maintenance interval
Every 400 times
vapor pumping
Yearly or
every 8,000 hours
Biennially or
every 16,000 hours
Bearing kit grease
／△ ○ △
Tip seal set
△ ○ △
Seal set
○ ○ △
O-ring set
○ ○ △
Exhaust valve set
○ ○ △
Air-flush kit
○ ○ ○
Pin crank kit
△ △ △
Vacuum pump itself Inside cleaning/
△
Inside cleaning /
△
Inside cleaning /
△
○・・・ Replace
△・・・
Replace if something goes wrong.
Note 1
：
Maintenance interval should be shorter than either the period or operating hours.
Note 2
：
When you want further maintenance and inspection after either the 6
th
year or 48,000 operating
hours, please contact our distributor who sold it to you.
Important
Causes of failure
Shorten maintenance interval if conditions of installation or operation are unfavorable.
In particular, ambient temperature has a great influence on failure. Maintenance interval is based on an ambient
temperature 5~40
℃ and a yearly average ambient temperature 25 ℃ .
Shorten the maintenance interval if temperature exceeds the foregoing. If not, it can cause failure.
Maintenance interval is not a guarantee period.
Exceeding maintenance interval
Operation exceeding maintenance interval increases risk of failure and accidents.
When maintenance interval has elapsed, be sure to contact either our sales branches who sold it to you or local
sales.