Ulvac DIS-90, Instruction Manual

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For safe operation
WARNING
Protect cable
from being
pulled
Danger of short-circuit and
electric shock
The power-supply conductor shall be free
from strain including twisting by using cord
anchorage, which is specified by the local
electrical wiring regulation.
If not, it can cause short-circuit fire or
bodily injury from electric shock.
Be sure to
ground
Danger of electric shock
Connect earth cord to earth terminal in
motor terminal box.
If not, it can cause bodily injury from
electric shock.
With a thermal
protector
Danger of restart
Be sure to switch off electric source before
maintenance or inspection.
Single-phase motor has a thermal
protector.
Vacuum pump restarts become cool
without warning after vacuum pump.
Never evacuate
hazardous gas
Danger of explosion and ignition
Do not evacuate gas which is hazardous
to humans or explosive, flammable, or
corrosive. Do not evacuate with
substances containing chemicals,
solvents, and powders.
If done, it can cause failure or bodily
injury by gas, explosion or ignition.
Avoid foreign
matter
Danger of entanglement and
foreign matter dispersal
Never put finger or foreign matter into air
hole of fan cover, air hole of motor or
clearance between FS(1) and FS(2)
cooling fins.
If done, it can cause bodily injury from
entanglement with turning section, or
foreign matter dispersal.
Never alter
Danger of electric shock and
entanglement
Do not remove or alter safeguards or
insulation parts.
If done, it can cause bodily injury from
electric shock or turning section and it
can cause deteriorated performance and
operating lifetime, and invalidate
guarantee.
Change after
vacuum pump is
stopped
Danger of failure and bodily injury
Change air-flush port only after vacuum
pump is stopped.
If you change it during vacuum pump
operation, it can cause vacuum pump
failure and bodily injury.
Conduct
periodical
maintenance and
inspection
Danger of failure and bodily injury
Conduct periodical maintenance and
inspection.
If not, it can cause insufficient
performance, failure of vacuum pump, and
bodily injury.
Be careful about
high temperature
Danger of burns
Conduct maintenance and inspection only
after vacuum pump becomes cool enough.
Maintenance and inspection soon after
vacuum pump stops can cause burn injury.
Turn off electric
source
Danger of electric shock
Be sure to conduct maintenance and
inspection after you turn off electric
source.
If not, it can cause bodily injury from
electric shock or turning object.
Ask specialist to
perform repairs
Danger of accident, failure and
shorter operating lifetime
Ask specialist to perform repairs.
Defective repairs can cause accident,
failure or shorter operating lifetime.
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