Ulvac DIS-90, Instruction Manual, Page: 5 / 32

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For safe operation
CAUTION
Use at
designated
temperature
Danger of overheating
Operate at ambient temperature of 5 ℃
~40
℃
.
Operating at a temperature range other
than that designated can cause accident,
failure or bodily injury such as burns due
to overheating.
Pa y atten tion
to ventila tion
Danger of overheating
Install in a well-ventilated area (refer to below
chart).
Poor ventilation can disrupt cooling and cause
accident, failure or bodily injury such as burns
since this vacuum pump is an air-cooled type.
Avoid du st
Danger of dust
Be sure site is free from dust.
Sucking in of dust can cause failure.
Install o n a
solid, le ve l
floor
Danger of unbalance
Be sure to install on solid and level floor (less than
5° inclination).
Uneven installation can cause failure and
movement of vacuum pump. If installation floor is
unstable, fix pump base with 4-φ7 holes of pump
leg (DIS-90).
Avoid d irect
sunlight
Danger of overheating
Install where equipment is not exposed to
direct sunlight.
Vacuum pump exposed to direct sunlight
can overheat, resulting in failure.
Check voltage
Motor burnout
Before doing any wiring, check electric source and
voltage. This pump is a multi voltage type of
AC100V/AC200V. Voltage can be changed at
terminal block. This pump is wired to 200V when
shipping from factory. Check your electric source,
voltage, and cord correctly to terminal block.
Improper wiring and incorrect voltage can cause
motor burnout.
Inspect cause of
problem
Danger of problem recurrence and
failure
If protective device or thermal protector activates,
be sure to turn off electric source and inspect
causes to solve the problem.
Do not operate until problem is solved.
Operation while problem is left unsolved can
cause problem recurrence and failure.
Remove blank
flange
Danger of exhaust disruption
Remove blank flange from inlet and outlet.
Operation with blank flange being fitted can disrupt
air flow or cause blank flange to fly by exhaust
impetus, resulting in accident, failure, or bodily
injury from contact with flying objects.
Prevent foreign
matter from
entering
Danger of foreign matter entering
inlet
When checking turning direction, be
careful not to enter foreign matter into an
inlet.
Foreign matter entering inlet can cause
failure.
Pay attention to
exhaust
resistance
Danger of exhaust disruption
When connecting exhaust piping to vacuum pump
and when combining piping with another vacuum
pump, pay attention to piping size and length so
that it does not cause exhaust resistance.
Exhaust resistance can disrupt air flow, resulting in
failure and over-current.
Start or stop
after closing
isolation valve
Danger of vacuum break and
pollution
Be sure to close isolation valve between
vacuum pump and vacuum system
(chamber) during start-up and stop.
Start-up or stop with isolation valve in the
open position can draw back gas and
debris attached to inside of pump to
vacuum chamber due to pressure
differential, resulting in vacuum break and
pollution on vacuum chamber side.
Open ai r
inlet
Danger of abnormal sound and failure
Open inlet to atmosphere for about 5 seconds
before restarting vacuum pump.
If not, it can unbalance temperature inside vacuum
pump, resulting in failure.