Functional Description
MS Detector
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2-28
______________________ Finnigan LTQ Hardware Manual _______________________
Turbomolecular Pump
A Leybold TW220/150/15S triple-inlet turbomolecular pump provides the
vacuum for the Q00 ion guide region, Q0 ion guide region, and analyzer
region of the vacuum manifold. The turbomolecular pump mounts onto the
bottom of the vacuum manifold.
The turbomolecular pump has three pumping inlets (see Figure 2-17):
•
A 400 L/s high-vacuum inlet at the top of the rotor stack, which evacuates
the analyzer chamber
•
An 300 L/s interstage inlet about half way down the rotor stack, which
evacuates the Q0 ion guide chamber
•
A 25 L/s third inlet in the molecular drag section of the pump, which
evacuates the Q00 ion guide chamber
Figure 2-16. Top cover plate of the vacuum manifold (underside), and
attached assemblies
Q0 Ion Guide
Q1 Ion Guide
Electron
Multipliers
Guide Pin
