4-11
Section 4
How to Obtain Flow Data
ZS Series
CompoWay/F Communication Command Reference
Section 4
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Details of Header Section
Data
Name
Details
A
Not used
Reserved bit
B
FlowDATA Overflow bit
NORMAL, 0 : 1 is set when flow data accumulation overflows.
C
Decimal point information
NORMAL, 0 : 0: nm order, 1:
µ
m order
D
TASK No.
TASK1 to TASK4 (*1)
E
Channel No.
Channel No. of the data source
F
Unit status (input)
Indicates ON/OFF status of each input wire.
(*2)
G
FlowData stop bit
•
All the data items are 1 when no flow data is sent afterward (or
always 1 upon single request).
•
All the data items are 0 when flow data is continuously sent
afterward (after the continual flow data request until it is
stopped).
H
TASK judgment result bit
Indicates the judgment result for the TASK of the data source. (*3)
I
J
K
Use prohibited
Reserved bit
L
Unit status (output)
Indicates output status (measurement result status) (*4)
Data
Measurement data
Signed 32-bit data
When the decimal point information section is 0: data in the unit of
nm
When the decimal point information section is 1: data in the unit of
µ
m
*1 TASK No. = bit data + 1
Example: When bit data=10B=2(dec)
It indicates as TASK3 data.
*2 The input wires are assigned from the lower bit as:
When ZS is used;
- Input terminal 4 (Unused, always 0)
- Input terminal 3
- Input terminal 2
- Input terminal 1
- Input terminal 0
(5 outputs in total)
*3 Data items and statuses to be received are shown below:
00b = unexecuted
01b = LOW
10b = PASS
11b = HIGH
*4 The output statuses are assigned from the lower bit as:
When ZS is used;
- Output terminal 4 (Busy output)
- Output terminal 3 (Enable output)
- Output terminal 2 (Low output)
- Output terminal 1 (Pass output)
- Output terminal 0 (High output)
(5 outputs in total)
Standard status is described in the parentheses.