3-16
Section 3
Setting Value Obtaining and Changing Command
ZS Series
CompoWay/F Communication Command Reference
Section 3
Unit No.
and P
a
rameter No.
Unit No.
(Note 1)
Data No.
Parameter
Setting range/
output range
Remarks
28h 08h
Input A setting (AVE,
MAX-MIN)
28h 09h
Input B setting (AVE,
MAX-MIN)
28h 0Ah
Input C setting (AVE,
MAX-MIN)
28h 0Bh
Input D setting (AVE,
MAX-MIN)
28h 0Ch
Input E setting (AVE,
MAX-MIN)
28h 0Dh
Input F setting (AVE,
MAX-MIN)
28h 0Eh
Input G setting (AVE,
MAX-MIN)
28h 0Fh
Input H setting (AVE,
MAX-MIN)
28h 10h
Input I setting (AVE,
MAX-MIN)
28h 11h
TASK 1 setting (AVE,
MAX-MIN)
28h 12h
TASK 2 setting (AVE,
MAX-MIN)
28h 13h
TASK 3 setting (AVE,
MAX-MIN)
28h 14h
TASK 4 setting (AVE,
MAX-MIN)
0: OFF
1: ON
Parameters when
[Expression]=
[AVE] and
[MAX-MIN]
28h 15h Thickness
-999999999 to 999999999
(nm)
Parameters when
[Expression]=
[Thickness]
29h 02h Scaling
mode
0: OFF
1: ON
29h 03h Span
value
-20000 to 20000
(X0.0001)
29h 04h Offset
value
-999999999 to 999999999
(nm)
2Ah 02h Smooth
0: OFF
1: ON
