Troubleshooting
77
GA 05.141/6.02 - 07/2003
Malfunction
Converter dead, LED
“mains” does not light up
after switching on.
Display malfunction, confu-
sing messages. No reaction
when pressing keys.
Vacuum chamber pressure
rises above normal backing
pressure while the pump is
stopped.
No purge gas flow
Base pressure not reached.
MAG CT does not heat up.
Display blurred.
Measures
Check the line voltage.
Contact Leybold service.
Switch the converter off and on again. If the
converter still malfunctions contact Leybold
service.
Open and close purge gas and/or venting
valve via control plug X14. LED on the valve
must light up and a clicking noise can be
heard. Foreline pressure drops while the
valve is closed.
Set purge flow according to specification.
Open and close purge gas and venting
valve via control plug X14. LED on the valve
must light up and a clicking noise can be
heard. Foreline pressure drops while the
valve is closed.
Leave the pump system run for 3 to 5 hours
to reach a pressure below 10
-5
mbar.
See TMS failures.
Operate the converter according to the spe-
cifications.
Possible Cause
No power supply.
Fuse F1 blown or converter failure.
Converter failure.
Purge gas and venting valve open or mal-
functioning.
Valve malfunctioning.
Degassing surfaces of rotor and stator. If the
pump was stored in a humid environment or
was exposed to humid ambient air all surfa-
ces will be covered with condensation.
TMS failure.
Ambient temperature too high or too low.
6.3 Malfunctions
