Description
4
GA 05.141/6.02 - 07/2003
Each Fuse 4 A
Fig. 2 MAG.DRIVE
digital
Front panel
1 Description
1.1 System overview
The Leybold MAG pumping system consists of:
•
The MAG turbopump; see Figure 1
The MAG are turbomolecular pumps utilizing magne-
tic bearings.They are designed to evacuate vacuum
chambers down to pressure values in the ultra high-
vacuum range and to pump high gas throughputs.
The C versions have a coated rotor and are desi-
gned for clean or light corrosive applications.
The CT versions are additionally equipped with a
temperature management system (TMS) to control
the pump temperature. They are prepared for use in
medium to harsh corrosive applications.
The pumps are available with 2 different rotors:
MAG version: Turbo pump
MAG W version: Turbo pump stages and an active
drag stage.
See table “Pump configuration” for an overview on the
available models.
•
The MAG.DRIVE
digital
frequency converter
The electronic converter converts the single-phase
line supply voltage into a three-phase DC voltage to
drive the pump motor. It also evaluates measured sig-
nals and controls
- the pump functions
- the temperature management system (TMS) and
- the active magnetic bearing system
The MAG.DRIVE
digital
can be operated with the
START and STOP keys, via a plug-in control, or via a
network interface.
•
A cable set consisting of:
- DRIVE/BEARING cable
- TMS cable if required
digital
