Troubleshooting
73
GA 05.141/6.02 - 07/2003
Failure Message on
Display
MB
MB, Purge ON
MB, Purge OFF
An abnormal displacement
ot the rotor occured at fre-
quencies between 146 Hz
and 600 Hz.
The additional message
gives information on the sta-
tus of the purge gas valve
the moment the failure occu-
red. It can be used to esti-
mate the run down time of
the pump.
Starting Time
The frequency has not rea-
ched 40 Hz 2 minutes after
the start command was
applied.
Accel. Time
The pump does not reach
the normal operation fre-
quency after the set maxi-
mum acceleration time.
Overload Time
The rotational speed has
dropped below normal ope-
ration frequency and stays
there for longer than the
maximum “Accel. Time”.
Shutdown Freq.
Rotational speed dropped
below the shutdown frequen-
cy threshold (140 Hz).
Cooling Temp. SC
The cooling water tempera-
ture sensor reads a tempera-
ture lower than 1
°
C.
Measures
Acknowledge failure message and restart
the pump. If failure message persists
contact Leybold service.
Check the chamber pressure during the
operation. Refer to Section 3.1 for correct
venting of the pump.
Contact Leybold service.
Reduce backing pressure.
Check if the rotor rotates freely. Contact
Leybold service if the rotor is damaged or
blocked.
Reduce backing pressure.
Set parameter “Accel. Time” to default
1000 s; see Section 4.3.5.
Reduce backing pressure. Additionally
check process gas flow.
Set parameter “Normal Operation” to default
95 % and parameter “Accel. Time” to default
1000 s; see Section 4.3.5.
Reduce backing pressure. Additionally
check process gas flow.
Measure the resistance between pins 1 and
3of the cooling water temperature sensor.
Contact Leybold if the resistance of the sen-
sor is under 100
Ω
.
See Figure on the next page for position of
the sensor.
Possible Cause
Mechanical shocks, possibly due to tool
maintenance.
Shock venting.
Converter failure.
Backing pressure too high during start-up.
Rotor blocked.
Backing pressure too high during start-up.
Parameter “Accel. Time” is not set correctly.
Backing pressure too high during operation.
Parameters “Accel. Time” or “Normal Opera-
tion” are not set correctly.
Backing pressure too high during operation.
Temperature sensor Pt 100 short-circuited.
