Installation
41
GA 05.141/6.02 - 07/2003
lower magnetic
bearing
Motor
upper magnetic
bearing
Sensor PVW 2,4
lower magnetic
bearing
24 V
Turbomolecular pump
Pump purge gas inlet
Vent valve: shown closed;
opens a bypass around the choke
when the pump is to be vented
Choke (capillary)
Purge gas valve: shown open
Sintered metal filter
Pressure regulator
Purge gas, e.g. N
2
, Ar or dry air
Forevacuum port
LEDs light when
the valve is open
Fig. 31
Purge gas and vent valve assembly and turbomolecular pump (schematic)
Fig. 32
Schematic drawing of the purge gas Tee
Venting gas
Purge gas
To purge gas inlet
of MAG W 830
and MAG W 1300
Choke (capillary)
