Inficon Ecotec E3000, Technical Handbook

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Content
1 General Information 1-1
1.1 Introduction 1-1
1.1.1 Intended Use 1-1
1.2 Support by INFICON 1-2
1.2.1 Service Centers 1-5
1.3 Unpacking 1-7
1.3.1 Supplied Equipment 1-7
1.3.2 Technical Data 1-8
1.3.3 Accessories 1-9
1.4 Notes on How to Use This Handbook 1-11
1.4.1 Numbering of Figures 1-11
1.4.2 Symbols of Vacuum Technology 1-11
1.4.3 Definition of Terms 1-11
1.5 Instrument Views of the Ecotec E3000 1-13
1.6 Installation 1-13
1.6.1 Set up 1-13
1.6.2 Mechanical Connections 1-15
1.6.3 Electrical Connections 1-18
1.6.4 RS232 Interface 1-19
1.6.5 I/O Port 1-19
2 How the Instrument Works 2-1
2.1 Description of the Functions 2-1
2.2 Description of the Subassemblies 2-2
2.2.1 Backing Pump 2-2
2.2.2 Turbo Molecular Pump (TMP) 2-2
2.2.3 Mass Spectrometer 2-2
2.2.4 Quadrupole Supply 2-2
2.2.5 Control 2-2
2.3 Displays and User Interfaces 2-3
2.3.1 Main unit display 2-3
2.3.2 Sniffer line with probe display 2-4
2.3.3 Built-in ECO-Check reference leak 2-6
3 Operation of the Ecotec E3000 3-1
3.1 Start-Up 3-1
3.2 Controls on the main display unit 3-2
3.3 Controls on the probe display unit 3-5
3.4 Performing measurements 3-6
3.4.1 Standard Operation Mode 3-6
3.4.2 I•Guide Operating Mode 3-8
3.4.2.1 Starting the I•Guide Mode 3-8
3.4.2.2 Selecting an I•Guide Program 3-9
3.4.2.3 Using an I•Guide Program 3-9
3.4.3 The Info Page 3-12
3.5 Calibration and Self-Test 3-14