Inficon Ecotec E3000, Technical Handbook

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6-2
Ecotec E3000 Messages
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22
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(1
20
6)
Error no. Plain text message Possible reason Recommendation
E1 24V of the MC50 too low Fuse F1 on the motherboard has blown Replace fuse F1 on motherboard*
E2 24V of sensor heating too low Fuse F2 on the motherboard has blown Replace fuse F2 on motherboard*
E3 24V II too low Fuse F3 on the motherboard blown Replace fuse F3 on motherboard*
W4 24V of the OPTION socket too low Fuse F4 on the motherboard has blown Replace fuse F4 on motherboard*
W5 5V of the sniffer is too low Fuse F5 on the motherboard has blown Replace fuse F5 on motherboard*
W6 5V of the internal Leak too low ECO-Check electronics defective Replace ECO-Check reference leak
or call nearest INFICON service
representative!
E7 -15V of the MC50 is too low Motherboard defective Call nearest INFICON service
representative!
E8 15V of the MC50 is too low Motherboard defective Call nearest INFICON service
representative!
W12 TMP frequency not reached during
start-up! Frequency converter faulty
Turbo molecular pump faulty
If W12 is issued in a high humidity
environment or after extended
shutdown times, please shut off the
Ecotec E3000 and turn it back on.If
W12 occurs again, please let the
Ecotec E3000
sit in idle (with the
pumps running) for about 30 min.
W14 Filter service interval expired! Time since last filter change longer than
set interval Please replace sniffer tip filter! (see
Section
8.6 )
W16 TMP service interval expired! More than three years since last TMP
maintenance Please replace lubricant reservoir!
(see Section
8.4 )
W17 Fore pump service interval expired! > 10,000 operating hours since last fore
pump service Replace membrane of diaphragm
pump!*
W18 Air filter service interval expired! > 10,000 operating hours since last main
air filter service Clean or replace main air filter!
See Section 7.2
E20 Temperature at electronic unit is too
high (>60°) Ambient temperature too high Cool down environment, place
Ecotec E3000 in cooler area.
Ventilation failure Check if fans on both side of main
unit are running (check for air flow
through inlets on both side of main
unit housing)
Air filter dirty Clean or replace main air filter
See Section 7.2
E22 TMP frequency too low! Frequency converter faulty
Tubro melecular pump faulty Call nearest INFICON service
representative!
E23 TMP frequency too high! Frequency converter faulty
Turbo molecular pump faulty
Call nearest INFICON service
representative!
W24 24V for the ext. control unit too low For Ecotec E3000RC only:
Fuse on the RC-driver board blown Replace fuse on RC-driver board!*