Inficon Ecotec E3000 Technical Handbook Download

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General Information

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Summary of Contents for Ecotec E3000

Page 1: ...H N I C A L H A N D B O O K kina22e1 p 1206 Translation of the original instruction Catalog No 530 001 530 002 530 103 530 104 530 105 530 106 from software version V 2 4 Ecotec E3000 Multi Gas Leak Detector ...

Page 2: ...0 2 kina22eIVZ fm Technical Handbook 1206 ...

Page 3: ...Port 1 19 2 How the Instrument Works 2 1 2 1 Description of the Functions 2 1 2 2 Description of the Subassemblies 2 2 2 2 1 Backing Pump 2 2 2 2 2 Turbo Molecular Pump TMP 2 2 2 2 3 Mass Spectrometer 2 2 2 2 4 Quadrupole Supply 2 2 2 2 5 Control 2 2 2 3 Displays and User Interfaces 2 3 2 3 1 Main unit display 2 3 2 3 2 Sniffer line with probe display 2 4 2 3 3 Built in ECO Check reference leak 2 ...

Page 4: ...Interfering Gas Suppression IGS 4 10 4 4 8 Setting up a user definable gas 4 10 4 5 Settings Sub menu 4 12 4 5 1 Vacuum Access Menu 4 12 4 5 2 Audio Functions 4 14 4 5 3 Display Settings 4 16 4 5 4 Setting up editing an I Guide Program 4 18 4 5 5 Miscellaneous Settings 4 21 4 6 Interfaces 4 23 4 6 1 Control location 4 23 4 6 2 Recorder outputs 4 23 4 6 3 RS232 Protocol 4 26 4 6 4 Baud rate end sig...

Page 5: ...8 3 Exchanging the air filter 8 3 8 4 Replacing the Operation Fluid Reservoir 8 5 8 5 Exchanging the mains fuses 8 8 8 6 Replacing filters in the sniffer line 8 9 8 6 1 Replacing the felt discs of the capillary filter 8 9 8 6 2 Replacing the felt discs with water protection tip 8 11 8 6 3 Checking replacing the sinter filter 8 11 8 7 Switching the capillary filter 8 12 8 7 1 Switching from metal t...

Page 6: ...ed personal only Consult local state and national agencies regarding specific requirements and regulations Adress any further safety operation and or maintenance questions to our nearest office Notice This can e g be the case if the unit has visible damage fluid has gotten into the device the device is no longer working the device has been stored for an extended period of time under unfavorable co...

Page 7: ...ctric shock Don t touch voltaged parts with the sniffer tip Test samples need to be disconnected from electricity before leak testing Warning For all contacts of the I O Port a maximum voltage of 60 V DC or 25 V AC must not be exceeded or reached to ground or ground equipment conductors According to the type of in or outputs lower voltages had to be accepted For this please refer to the informatio...

Page 8: ...sion Hydrogen forms a highly explosive gas mixture with air Great caution is necessary when using hydrogen No smoking no naked flames avoid sparks Warning Danger of explosion To use the Ecotec E3000 in explosion hazard areas could cause ignition of flammable mixtures The Ecotec E3000 must only be operated outside of explosion hazard areas Caution The Ecotec E3000 must not be operated while standin...

Page 9: ... carrying the leak detector at the sides of the main unit must not be covered at any time as these acts as air inlet and outlet Avoid the presence of heat sources in the vicinity of the Ecotec E3000 Caution Before connecting the Ecotec E3000 to the mains you must make sure that the mains voltage rating of the Ecotec E3000 coincides with the locally available mains voltage Caution Do not suck in an...

Page 10: ...ntain toxic substances from the pumped media Please dispose of lubricant reservoir as required by local regulations A Safety Data sheet for the lubricant is available on request Caution Caution Abrupt movements Abrupt movements can damage the running turbo pump Avoid abrupt movement and vibration of the instrument e g running over cables door sills during operation and up to 4 minutes after switch...

Page 11: ... an overpressure within the test sample and when searching the test sample with a sniffer probe from the outside sniffer method The use of this sniffer probe is mandatory for proper operation and it is available as an accessory Cat No 525 001 to 525 004 Proper use includes Conformance with the technical specifications Use of standard and original accessories Observance of the instructions and guid...

Page 12: ...equipment is free of substances damaging to health or whether it is contaminated If it is contaminated also indicate the nature of the hazard INFICON must return any equipment without a Declaration of Contamination to the sender s address You will find an appropriate form at the next page General We reserve the right to alter the design or any data given in this handbook The illustrations are not ...

Page 13: ...General Information 1 3 kina22e chapter 1 fm technical handbook 1206 ...

Page 14: ...e no yes 2 radioactive no yes 2 other harmful substances no 1 yes The service repair and or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay This declaration may only be completed in block letters and signed by authorized and qualified staff Copies Original for addressee 1 copy for accom...

Page 15: ...infoqro meisa com Italy davide giovanetti inficon com MEISA S a de C V Querètaro Phone 52 44 22 25 42 80 Fax 52 44 22 25 41 57 INFICON GmbH Castelnuovo Phone 39 045 6 40 25 56 Fax 39 045 6 40 24 21 China reach china inficon com Israel urimark mark tec co il INFICON LTD Hong Kong Phone 852 2862 8863 Fax 852 2865 6883 Mark Technologies Ltd Kiriat Ono Phone 972 35 34 68 22 Fax 972 35 34 25 89 INFICON...

Page 16: ...56788 112 Fax 49 221 56788 9112 Republic of South Africa vacuquip hotmail com Turkey jhj agramkow dk Vacuquip Randburg Phone 27 73 15 78 355 Agramkow Sonderborg Phone 45 741 236 36 Fax 45 744 336 46 Russia leakdetection service inficon com Ukraine leakdetection service inficon com INFICON GmbH Cologne Phone 49 221 56788 112 Fax 49 221 56788 9112 INFICON GmbH Cologne Phone 49 221 56788 112 Fax 49 2...

Page 17: ...ment The Ecotec E3000 leak detector is ready for operation Before installation please read Section 1 5 Included with the leak detector are the following items Ecotec E3000 main unit Mains cord 3m long Set of fuses 3 x 10 pcs Spare air filter 8 mm hexagonal wrench 19 mm ring wrench Documentation Operating Instructions kima22e1 Technical Handbook Ecotec E3000 kina22e1 Spare Parts List Ecotec E3000 k...

Page 18: ...y for operation 2 min Mains voltages and mains frequencies 90 127 V 50 60 Hz fixed 115 140 V 60 Hz 187 265 V 50 60 Hz Power consumption 300 VA Type of protection IP 20 Overvoltage category II Mains cord 2 5 m Noise level 54 dBA Dimensions w x h x d in mm 610 x 370 x 265 Weight 34 kg Permissible ambient temperature during operation 10 C to 45 C Permissible storage temperature 20 C to 60 C Max rel h...

Page 19: ... 15 FT 385 385 mm long flexible 122 16 FT 600 600 mm long flexible 122 09 ST 500 500 mm long rigid 45 angled 122 72 Water protection tip for sniffer 122 46 Holder for SL3000 sniffer line 525 006 ECO Check reference leak for R134a 531 001 Calibrated sniffer leaks for single refrigerants 2 5 g a 16 g a also available R134a 122 20 R600a 122 21 R404A 122 22 R502a 122 23 R22 122 25 R23 122 26 R152a 122...

Page 20: ...hydrogen 10 hydrogen 90 helium range 10 5 mbar l s 122 33 Calibrated leaks for other refrigerants on request External display unit for Ecotec E3000RC for bench top use 551 100 for rack mounting 551 101 Connecting cable for external display unit for Ecotec E3000RC 5m 551 102 for Ecotec E3000RC 1 m 551 103 ...

Page 21: ...In the following some important symbols of vacuum technology as used in this handbook are shown 1 4 3 Definition of Terms Main menu This menu is shown first after operating the Menu push button Sub menus Comprise all menus which may be accessed from the main menu Unauthorized changes to many of these sub menus may be prevented by a password see also Section 4 5 1 Menu item A single menu line Defau...

Page 22: ...e to this correction the stored offset values are changed so that ZERO will be the lowest value which can be obtained In this way the values adapt automatically to a decaying background adaptive background correction Internal background The existing partial pressure in the measurement system The level of the internal background is measured all the time and subtracted from the measured signal I Gui...

Page 23: ...efore starting up the Ecotec E3000 The Ecotec E3000 is supplied ready for operation Initial start up is described in Section 3 1 Fig 1 2 Instrument views of Ecotec E3000 Pos Description Pos Description 1 Main display 4 Lemo Connector for sniffer line 2 Handle for carrying the Ecotec E3000 5 Speaker 3 ECO Check reference leak Caution The weight of the Ecotec E3000 exceeds 25 kg It therefore should ...

Page 24: ...the Ecotec E3000 a space of at least 20 cm 8 in must be kept unobstructed to the sides The clearance at the rear must be no less than 10 cm 4 in Moreover the Ecotec E3000 handles for carrying the leak detector at the sides of the main unit must not be covered at any time as these acts as air inlet and outlet Avoid the presence of heat sources in the vicinity of the Ecotec E3000 Caution Make sure t...

Page 25: ...c E3000 must be set to ADVANCED MODE for access to this submenu See section 4 5 3 Go to SETTINGS DISPLAY USER MODE 3 On the certificate which is delivered with the ECO Check you will find a serial number and a 12 digit code Enter the serial number in the first line of the open submenu and the 12 digit code in the second line and press OK Notice The ECO Check reference leak must be installed in the...

Page 26: ...ittle slots on the front side at the very top area of the blue square front of the main unit Hold the holder horizontally and then insert the two little hooks of the holder into the two slots either on the right or the left side With the hooks still inserted let the holder flap down It will automatically attach to the metal front by the magnet on the backside of the holder Now insert the sniffer p...

Page 27: ...en a ECO Check reference leak may be used for internal calibration The ECO Check reference leak has to be inserted to the Ecotec E3000 see section 2 3 3 On first usage of your ECO Check you need to initialize the use of this reference leak in the Ecotec E3000 menu Please perform the following steps 1 Insert the ECO Check into the appropriate opening of the Ecotec E3000 2 In the software menu go to...

Page 28: ...om the name plate left of the power switch The mains voltage setting of the Ecotec E3000 is fixed and can not be changed A separate fuse for each of the mains conductors has been integrated into the mains socket Fig 2 1 6 Fig 1 8 Ecotec E3000RC with external display unit for a bench top use left side b rack mounting right side Fig 1 9 Electrical connections Pos Description Pos Description 1 Headph...

Page 29: ...e connection is provided through a commercially available Sub D plug For further information see Interface Description Ecotec E3000 kins22e1 1 6 5 I O Port The I O part allows communication with external equipment via analog data For details see Section 7 2 Through this connection some functions of the Ecotec E3000 can be controlled externally or measurement data or the Ecotec E3000 status may be ...

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Page 31: ... spectrometer only operates under high vacuum conditions i e the pressure in the mass spectrometer must always stay below 10 4 mbar This vacuum is generated by the turbo molecular pump with the support of the diaphragm pump The pressure pV between the two pumps is measured with a piezo resistive measuring system and this pressure lies in the range between 4 to 10 mbar while in the measurement mode...

Page 32: ... ion source ionizes neutral gas particles and generates an ion beam The positively charged ions are accelerated out of the ion source and then enter the Quadrupole field This field acts like a filter Only the ions to which the system has been adjusted are able to meet the separating conditions and arrive at the ion collector where their presence can be measured as a current by an electrometer ampl...

Page 33: ...it instead of the built in main unit display Two LED s left of the plug provide information about the status of the Ecotec E3000RC even when the external display unit is disconnected The green LED will indicate that the Ecotec E3000RC is in operation switched on The green LED will show continuous green light if an external display unit is connected and will blink if no external display unit is det...

Page 34: ... display The probe handle also offers a small display for operating the Ecotec E3000 remotely without access to the main unit during normal leak detection operation In addition to the display the sniffer probe offers two press buttons The left button will function as the ZERO button in any operating mode By pressing the left button the current background reading is set to ZERO The ZERO function ca...

Page 35: ...ak tested The LEDs offer some bundled light The intentional starring suspends the lid closing reflex and also the eyes do not move anymore which may lead to overheating of the retina When looking into the LEDs incidentally the eye is protected by the lid closing reflex Also the permanent movement of the eyes prevents overheating and consequent damage of the retina Fig 2 5 Probe handle Warning Do n...

Page 36: ...correct functioning of the Ecotec E3000 including the correct calibration and can also be used for re calibrating the Ecotec E3000 if necessary The ECO Check reference leak is inserted in the front of the housing Insertion of the sniffer tip into the cone shaped test leak opening is automatically detected via a light barrier Fig 2 6 Built in ECO Check reference leak Fig 2 7 ECO Check reference lea...

Page 37: ...ice The ECO Check reference leak is not part of the Ecotec E3000 shipment and needs to be ordered as a separate part no see section 1 3 3 Notice If you have not purchased the ECO Check reference leak warning 71 No communication with test leak will be issued on first start up Please go to SETTINGS INTERFACES ECO CHECK and set the ECO Check to DISABLED to prevent future warnings see section 4 6 7 Th...

Page 38: ...2 8 How the Instrument Works kina22e chapter 2 fm technical handbook 1206 ...

Page 39: ... Ecotec E3000 will automatically start a self test and run up procedure This takes about 2 minutes max During the start up the fore line pressure the flow the rotation speed of the turbo molecular pump will be displayed The individual steps are indicated on the display In the case of unfavorable conditions switching on of the emission may take several minutes Fig 3 1 Connection of the mains cord P...

Page 40: ...ving switched on the Ecotec E3000 on at the earliest warm up phase Notice If you have not purchased the ECO Check reference leak warning 71 No communication with test leak will be issued on first start up Please go to Settings Interfaces ECO Check and set the ECO Check to disabled to prevent future warnings see section 4 6 7 3 2 Controls on the main display unit All set up and control functions ar...

Page 41: ...lay allow to adjust the volume of the alarm sound at any time When pressing any of the two buttons the currently selected volume will be demonstrated by the loudspeaker as well as by a bar graph in the status line The selected value is also displayed as the first entry of the status line at the bottom of the display and only applies to the loud speaker in the main unit For selecting different type...

Page 42: ...indicator will be removed from the status line For details on the ZERO function see Section 4 5 1 Info Button When pressing the i info button bottom right side of the display information on the status of the Ecotec E3000 will be displayed For details see section 3 4 3 Status line In the bottom line of the main display status information is indicated First the currently selected volume for the audi...

Page 43: ...rent background reading is set to ZERO The ZERO function can be disabled by holding the ZERO button until a beep will indicate that the ZERO function has been successfully switched off The ZERO function can be re activated by pressing the ZERO button once again For details on the ZERO function please refer to 4 5 1 ZERO The right probe button allows to switch the bar graph display to the next of t...

Page 44: ...xt hold the tip of the sniffer as close as possible to the suspected leak if required the tip may even touch the test object If a welded seam or alike needs to be tested the tip should be moved at a velocity of no more than 10 cm s 4 inch per second along the welded seam The distance between tip and test sample should be as small as possible If a leak is detected the bar will grow The Ecotec E3000...

Page 45: ... As soon as an acoustic alarm sounds the tip should be removed from the spot being tested After displaying a constant leak rate the ZERO button should be pressed again to repeat the test Thus a measurement error can be prevented and the leak can be located Fig 3 6 Sniffer display when detecting a leak Unit Lower display limit Upper display limit g a 0 05 1 000 oz yr 0 002 1 000 ppm 0 5 100 000 mba...

Page 46: ...e If the number of locations to be tested is set to 0 the Ecotec E3000 will operate in a continuous mode without checking for a global leak rate but still issue the timer signal for proper testing 3 4 2 1 Starting the I Guide Mode To start the I Guide Mode go to the main menu and choose SETUP I GUIDE In the opening menu go to the top line item and change the setting to ON with the left hand side p...

Page 47: ...ow loaded 3 4 2 3 Using an I Guide Program In the measuring screen of the I Guide operating mode the selected program the gas type stored in the program as well as the summarized global leak rate will be displayed In the I Guide message line the Ecotec E3000 will prompt the user for action First it will ask to move to the first testing position Also on the probe display the message okay pos 1 will...

Page 48: ... displayed on the main unit The probe display will read tip to pos 2 Please move the sniffer tip to the next testing location and if the wait time indicated in the display has elapsed you may start the next measurement If the operator tries to start the next measurement before the wait time has elapsed Fig 3 10 I Guide screens during measurement one gas selected Pos Description Pos Description Pos...

Page 49: ...ual program cycle number The program cycle counter is increased by 1 after each completed cycle The cycle counter may be reset manually in the Setup I Guide menu see section 4 5 4 The cycle counter is also automatically reset on power off Next the summarized global leak rate is started If the global leak rate is lower than the global leak rate trigger the message Global leak check okay will be dis...

Page 50: ...ally By pressing the right probe button the next testing cycle may be started 3 4 3 The Info Page By pressing the INFO button on the main display a general info page will open Information on the software version used the number of operating hours the serial number time date and the currently selected alarm type will be stated Also the selected gases with their mass position will be listed Gases th...

Page 51: ...ogram the selected program name the gas used for this program the number of points to be checked for this program the selected measuring and wait time as well as the global trigger If two gases are selected for the I Guide program the gas type A B and the global trigger A B will be displayed alternatively Fig 3 16 Info page with active warning Fig 3 17 Info page in I Guide mode ...

Page 52: ...r start up Only confirm and continue with the calibration or proof if the real warm up time has been longer than 20 minutes e g after a quick restart of the Ecotec E3000 Notice When detecting hydrogen a longer warm up time is required For hydrogen please calibrate the Ecotec E3000 not before 1 h after start up Notice The accuracy of an internal calibration is less than the accuracy of a calibratio...

Page 53: ...0 will check the reading from the ECO Check Afterwards the operator will be requested to remove the sniffer tip from the leak opening Notice Any time during the verification procedure an internal calibration may be started by pressing either the right sniffer probe button or the CAL button on the main display The results of the verification will be displayed in a summarizing screen For gases that ...

Page 54: ...t look for a baseline find the Argon peak of the air and then measure the test leak Afterwards the operator will be requested to remove the sniffer tip from the leak opening After completion of the calibration a screen summarizing the results of the calibration will be displayed For gases that are allowed for internal calibration the old and new calibration factor and the old and new relative peak...

Page 55: ...ed via the CAL button from the measuring mode at any time except when the menu is open or the function has been locked A running calibration process may be cancelled by operating the ESC button After pressing the CAL button the currently selected gases with their selected mass positions will be listed By pressing one of the four buttons on the right side of the display the gas to be calibrated ext...

Page 56: ...s completed a message sniff air will be displayed Remove the sniffer tip from the opening of the calibrated leak and hold the sniffer tip into the air as far as possible from any sources of refrigerant Wait until the bar graph shows a stable signal again and press OK once more Notice When calibrating for helium or Hydrogen the air signal will decrease only slowly and the time for the air signal to...

Page 57: ...disabled is stated the selected gas is not set up to be calibrated internally but must be calibrated via an external test leak If the chosen gas can not be calibrated with the ECO Check reference leak because its mass position is below 40 amu or above 105 amu this line will state impossible For details on how to perform an internal calibration see Section 3 5 2 3 6 Shutdown To shut down the Ecotec...

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Page 59: ...s highlighted by inverted colours The up and down keys are also used for changing numerical values to a new setting Help function by pressing this key additional information on how to use this page can be displayed Esc Going back to the previous page while omitting any changes Back Going back to the next higher level in the menu structure OK Accepting a selected item from a list or accepting newly...

Page 60: ...ait time 4 Button ON OFF 6 Miscellaneous 2 Language 3 Time date 4 Sniffer light 5 Pressure unit 6 Leak rate filter 7 Alarm delay 8 Wake up 7 Display 2 Contrast 3 Peak hold 6 Gas select 7 User mode 8 Interfaces 2 Control location 3 Recorder outputs 5 Setup PLC 5 Define PLC inputs 6 Define PLC outputs 6 RS232 protocol 7 Baud rate End sign 8 ECO Check 1 7 History 2 Error history Maintenance 3 Calibra...

Page 61: ...t mode the Ecotec E3000 may be put to sleep by keeping the lower left button of the main display pressed and now pressing the lower right button 4 3 The Service Menu The service menu is password protected When entering the service menu a PIN is required to be entered The service menu should only be used by trained service personnel The PIN for entering the service menu will be distributed during s...

Page 62: ...Check reference leak the line item Internal cal will show enabled If disabled is stated the selected gas is not set up to be calibrated internally but must be calibrated via an external test leak If the chosen gas can not be calibrated with the ECO Check reference leak because its mass position is below 40 amu or above 105 amu this line will state impossible For details on how to perform an intern...

Page 63: ...and press EDIT In the opening submenu you now have the choice of selecting ENABLE DISABLE or EQUIVALENT NAME By pressing EQUIVALENT NAME the gas library will open again and you may select the appropriate gas EQUIVALENT NAME Notice If a gas equivalent has been selected the gas type will be displayed as the tracer gas followed by the equivalent in parenthesis in all menus Example He R134a In the EDI...

Page 64: ...rom helium hydrogen to refrigerant will be displayed If a set of parameters is entered that exceeds the boundaries of the Ecotec E3000 the CORRECTION FACTOR will be displayed in inverted colours In this case adjust the parameters until the CORRECTION FACTOR is displayed in normal colours again Press OK if all parameters are as desired Notice This menu should also be used when working with diluted ...

Page 65: ...trigger can be set to is listed in the following table Default value 4 0 The leak rate unit can be changed by the use of the right UP and DOWN keys Available leak rate units include mbar l s Pa m s Torr l s atm cc s g a oz yr ppm Default unit g a Unit Lower trigger limit Upper trigger limit g a 0 1 1 000 0 oz yr 0 004 100 00 ppm 1 999999 mbar l s 2x10 7 9 9x10 2 Pa m s 2x10 8 9 9x10 3 atm cc s 2x1...

Page 66: ...of the search level is displayed at the bottom of the menu page Default value 90 For each gas the lower display limit may be edited with two UP and DOWN buttons on the right side of the display The absolute value of the lower display LIMIT is displayed at the bottom of the menu page Available factors are 1 2 5 10 20 50 100 4 4 5 Enabling disabling internal calibration To enable or disable the inte...

Page 67: ...ternative mass positions is available in Section 9 gas library The selected mass position can be changed by scrolling to the MASS line item in the EDIT GAS sub menu and pressing the EDIT key In the following display page the available different positions for the selected gas can be scrolled with the up and down keys Below the selected mass it is indicated whether or not this is the preferred mass ...

Page 68: ...ting with the highest gas number of 1 to 4 will be disabled automatically so that only two gases are left activated Notice For R600a in IGS mode and R134a as the second gas please chose mass position 83 for R134a as otherwise there will be interference between the foaming agent and R134a Notice The IGS function should require almost no maintenance However if you should notice repeating false alarm...

Page 69: ...gnal When setting up a user definable gas please try to calibrate the Ecotec E3000 afterwards with an external test leak If the calibration is successful do not change the normalization factor If the calibration process is not successful and the error message Calibration factor too high is displayed please decrease the normalization factor by one decade e g from 1 0E 08 to 1 0E 07 If the error mes...

Page 70: ... example 0 05 g a Only values above this ZERO level are indicated so that resolution of the displayed measurement signal is improved Notice It is not possible to reduce the detection limit of the Ecotec E3000 by pressing the ZERO button only resolution is improved Should the background which has been suppressed using the ZERO button change the ZERO level is updated automatically This avoids a cond...

Page 71: ...the sniffer line may drop significantly approx 20 per 1000 m 3000ft altitude In this case please adjust the flow limits accordingly Sensitivity check SENSITIVITY CHECK is a monitoring function which will help to ensure that the sensitivity of the Ecotec E3000 will always be sufficient In the SENSITIVITY CHECK submenu the sensitivity check can be enabled or disabled With this setting the entire gas...

Page 72: ...fterwards the menu PIN will be changed to the new value Notice The operator needs to go back up through the main menu for this change to become effective immediately Otherwise the new PIN will be activated after 5 minutes A menu PIN of 0000 means no password protection all menus can be freely accessed Default setting 0000 4 5 2 Audio Functions In the AUDIO sub menu all settings regarding the diffe...

Page 73: ...n between 0 and 15 Default value for minimum volume 2 Default value for the current volume 2 SETPOINT The frequency of the tone will change when the trigger level is exceeded Below the trigger level the loudspeaker will remain off TRIGGER ALARM An acoustic alarm with a continuous low tone will sound as soon as the search level is exceeded An acoustic alarm which consists of two tones sounds as soo...

Page 74: ...vel 50 Notice If by accident the display contrast has been set too high or too low so that it cannot be read off anymore this can be fixed as follows Shut off the Ecotec E3000 and switch it back on During run up press menu buttons 3 and 7 constantly until the contrast is back to normal This setting is not saved to the EEPROM but needs to be confirmed manually through the contrast menu Otherwise th...

Page 75: ...d use of the right probe button will scroll through the currently active gases In the AUTO WITH HOLD mode also the gas with the currently highest leak rate will be indicated on the probe display However this can be overruled by the use of the right probe button The Ecotec E3000 will automatically switch back to the automatically selected highest leak rate after the pre set hold time Default mode a...

Page 76: ...de cycle counter The reset counter button on the right side of the display allows to reset the I Guide cycle counter manually The I Guide cycle counter is not saved on power off and therefore is also automatically reset on each power on off of the Ecotec E3000 Button The button function allows to disable the use of the right sniffer probe button which is used for navigating through an I Guide prog...

Page 77: ...s to be leak tested the minimum measuring time for each location as well as the wait time between two leak tests allowed for moving the sniffer to the next location is stated Each parameter can be edited by scrolling to the appropriate line item and selecting the highlighted item by pressing the EDIT button If only one gas is selected the GLOBAL TRIGGER B line item will be skipped on scrolling Not...

Page 78: ...alue 10 g a or 0 357 oz yr or the equivalent in any other unit of measurement No of points The number of potential leak locations to be checked can be varied between 0 and 99 and can be edited with the up and down keys Default value 4 Notice The I Guide mode can also be used as a timer signal only If the number of points is set to 0 the Ecotec E3000 will prompt for the next location to be tested c...

Page 79: ...n off the power and press the second button from the top of the display on both sides simultaneously during run up This will reset the Ecotec E3000 to English as the menu language This setting is not saved automatically Please go to the LANGUAGE submenu afterwards and select the appropriate language Time date In this submenu the internal clock of the Ecotec E3000 can be set On the first page the d...

Page 80: ... background conditions it may be favourable to not issue an alarm immediately but only release an audio alarm if the trigger level has been exceeded for an extended time This ALARM DELAY can be entered in 1 10 of a second Values between 0 and 9 9 sec will be accepted Default value 0 0 sec i e disabled Wake up If you are working in one or two shift operation you may use this function to automatical...

Page 81: ...s software menus Please lock these by the menu PIN to prevent unintended changes 4 6 2 Recorder outputs For the recorder output the RECORDER OUTPUT SCALE and the RECORDER OUTPUT GAS can be selected The RECORDER OUTPUT SCALE can either be linear or logarithmic The output signal is provided through channel 1 pin 1 of the I O port Which of the 4 gases is indicated here is defined through the menu lin...

Page 82: ...he range of 3 to 5 Volts Examples The following table has been provided to clarify the way in which the output voltage represents the leak rate Further examples For a trigger level of 2 g a a leak rate of 8 g a is represented by an output voltage of 4 81 V U 3 2 log 8 The factor of 2 is used since one decade is spread over 2 Volts The summand of 3 is used because the trigger level will always be w...

Page 83: ...t indicates the gas number by way of a voltage i e a voltage between 1 V 4 V will be present accordingly When selecting AUTO the leak rate which has the highest value with reference to the corresponding trigger level is output as the analog signal Correspondingly the voltage in channel 2 will differ accordingly In the modes ERROR NOT READY TO MEASURE and SLEEP a voltage of U 10 V will be output th...

Page 84: ...en in any of the two printer modes no ASCII commands must be sent to the Ecotec E3000 as this will interrupt the printer mode When set to I Guide mode the PRINTER MANUAL mode is without function Printer Auto In PRINTER AUTO the leak rate will be sent any time the set trigger level is exceeded At the time the signal drops below the trigger level the maximum detected leak rate will be sent only for ...

Page 85: ...tting is as follows To change these settings select the appropriate pin with the UP and DOWN arrows on the left side of the display and afterwards select the desired command from the list of commands with the UP and DOWN buttons on the right side of the display Press OK to save your settings A screen with all selected settings will be displayed for your reference Confirm with OK again Point 03 12 ...

Page 86: ...priate pin with the UP and DOWN arrows on the left side of the display and afterwards select the desired command from the list of commands with the UP and DOWN buttons on the right side of the display Press OK to save your settings A screen with all selected settings will be displayed for your reference Confirm with OK again Pin Command Pin Command 4 Ready 16 Leak 5 not used 17 Error Pin Type of c...

Page 87: ...n ADVANCED Mode In this submenu the ECO Check reference leak can be disabled completely so that for Ecotec E3000 leak detectors without an ECO Check onboard the Ecotec E3000 does not check for the electrical connection with the reference leak anymore and no error message is issued Default value Enable ...

Page 88: ...rmat Description Page 1 General Data Foreline pressure mbar Pressure at inlet to mass spectrometer Flow sccm Flow through sniffer line Total pressure mbar Pressure in mass spectrometer Time since power on Min Operation hours h Serial number 9000 XXX XXXX Software version x xx xx Circuit temperature C F Temperature of main board TSP temperature C F Temperature of mass spectrometer Test leak tempera...

Page 89: ...on time H Emission on time A H Emission on time B H TSP temperature C F Temperature of mass spectrometer Argon Position x xx Page 4 ECO Check data Gas Rxxx Gas type of internal leak Leak rate nom at T g a g a Version Checksum x x Hex Code Software Version with Checksum Serial no 9000 XXX XXXX Serial no reservoir 9000 XXX XXXX Date of bottling DD MM YYYY Expiry date DD MM YYYY Gain Offset Test leak...

Page 90: ...w at calibration sccm Page 6 I O Port data Recorder A V Recorder B V Sleep low high Zero low high Gas a b select low low low high high high Input reserved low high Leak Ready Error low low low high high high Relais Leak low high Relais Ready low high Output reserved low high Page 7 Analog data AIN3 Sniffer length V AIN4 5V II Leak V AIN5 24V III ext V AIN6 5V I Sniffer V AIN8 15V MC50 V Menu item ...

Page 91: ... Foreline pressure mbar AIN1 V Flow sccm AIN2 V Page 9 RS232 Info Ecotec E3000 sniffer ASCII string Command sent from main unit to sniffer Sniffer Ecotec E3000 ASCII string Command sent from sniffer to main unit Host Ecotec E3000 ASCII string Command sent from host to Ecotec E3000 Ecotec E3000 Host ASCII string Command sent from Ecotec E3000 to host Menu item Format Description ...

Page 92: ... of the Ecotec E3000 can be viewed This includes error lists a listing of the calibration history and a service list The available functions depend on the current user mode in STANDARD the following menu is to be seen The menu page changes in user mode ADVANCED Fig 4 23 The HISTORY MAINTENANCE menu page user mode STANDARD Fig 4 24 Ehe HISTORY MA IN TEN AN CE menu page user mode AD VA NC ED ...

Page 93: ...istory In this listing all calibrations that were conduced during the operation of the Ecotec E3000 are collected The DATE TIME the calibration was performed the TYPE of calibration internal or external which GAS number in gas of external calibration as well as the calibration factor are listed Each line may be viewed by pressing the VIEW magnifying glass icon button If you view an external calibr...

Page 94: ... with test leak and background signal only in ADVANCED mode Maintenance interval In the MAINTENANCE INTERVAl sub menu the number of operating hours for the main Ecotec E3000 in total the operating hours of the turbo molecular pump and of the Transpector are listed Also all necessary maintenance tasks are displayed and the number of operating hours days until they are due for maintenance the next t...

Page 95: ...te and the number of operation hours at which the maintenance task was performed is saved in the software Maintenance must be confirmed for the lubricant reservoir the air filter in the main unit and sniffer tip filter The maintenance intervals for the lubricant reservoir and main unit air filter are fix and a reminder for the different maintenance tasks will be issued by the software after the ap...

Page 96: ...m will only be available as long as the ECO Check is enabled in the SETTINGS INTERFACE ECO CHECK submenu Sniffer tip filter in STANDARD user mode only The maintenance interval for the sniffer tip filter depends on the operating environment and may be set to values between 10 and 999 hours If set to 0 the reminder message for the sniffer tip filter will be disabled Default value 100 hours For detai...

Page 97: ...ld only be disabled when operating in argon free environment as the argon signal is used for monitoring For details on this function see Section 4 5 1 Sensitivity Check If sensitivity changes ERROR CODE E30 will be displayed In this case please recalibrate the Ecotec E3000 to restore sensitivity see Section 3 5 The error code will be displayed every 15 seconds until a recalibration is started ...

Page 98: ...4 40 Equipment Settings kina22e chapter 4 fm technical handbook 1206 ...

Page 99: ...n its own Errors are indicated in plain text together with an error number The Ecotec E3000 remains in the error status After the fault cause has been removed the error can be acknowledged by pressing the RESTART button The Ecotec E3000 then returns to the measurement mode Warnings Warnings are issued if an abnormal condition is detected that may cause increased inaccuracies of measurements but wi...

Page 100: ... back on If W12 occurs again please let the Ecotec E3000 sit in idle with the pumps running for about 30 min W14 Filter service interval expired Time since last filter change longer than set interval Please replace sniffer tip filter see Section 8 6 W16 TMP service interval expired More than three years since last TMP maintenance Please replace lubricant reservoir see Section 8 4 W17 Fore pump ser...

Page 101: ...ne filters W35 Flow through capillary is too low Actual flow is lower than lower flow limits In LOW FLOW mode Filter in sniffer line blocked Capillary blocked Filter in main unit blocked Lower flow limit setting too high Replace sniffer tip filter See Section 8 6 Replace filters of sniffer line and recalibrate felt filter capillary filter and or filter pad in SL3000XL sniffer line and recalibrate ...

Page 102: ...ture 70 C or 0 C Air filter dirty Ambient temperature too high Ambient temperature too low Replace main air filter see Section 8 3 Check ambient temperature E43 Transpector limit exceeded Refer to Transpector internal data Call nearest INFICON service representative E44 Transpector communication error Refer to Transpector internal data Call nearest INFICON service representative E45 Transpector ha...

Page 103: ...EEPROM W62 EEPROM parameter lost Parameter has been modified during software update and reset to default value Affected parameters are listed below warning Check setting of modified parameters in corresponding software menu and set to desired value If message comes up repeatedly during start up EEPROM on motherboard is faulty Replace EEPROM W63 TSP parameter mismatch TSP replaced or SW updated Non...

Page 104: ...kground by disabling the ZERO function keep ZERO button pressed for more than 2 sec provide fresh air to clean up background Not enough time expired for air signal to stabilized acknowledged too early Repeat calibration allow sufficient time for air signal to stabilize W79 Factor out of range Invalid factor determined drring IGS calibration Repeat IGS calibration see Section 8 2 If problem persist...

Page 105: ...r pack output voltage faulty Call nearest INFICON service representative E92 E006 Start up time error Free running of the turbo pump restricted Fore vacuum pressure too high Call nearest INFICON service representative E93 E008 Connection TC and pump Connection between TC and pump faulty Call nearest INFICON service representative E94 E015 Error in TC controller Reset the controller with mains ON O...

Page 106: ...6 8 Ecotec E3000 Messages kina22e chapter 6 fm technical handbook 1206 ...

Page 107: ...n 6 3 R600a Cyclopentane Isopentane When detecting R600a in the presence of cyclopentane and or isopentane foaming agent R600a should be set to IGS as the mass position Please refer to Section 4 4 7 for how to activate the IGS mode 6 4 Helium When detecting helium the response time of the Ecotec E3000 will be longer than for refrigerants Please allow for the following minimum measuring times when ...

Page 108: ...rl s higher than for refrigerants When detecting hydrogen forming gas a ECO Check reference leak cat no 521 001 may be connected to the Ecotec E3000 remotely and used for internal calibration of hydrogen forming gas 6 6 Methan Notice The setting for methane is commonly used for the detection of leaks of natural gas which mainly consists of methane Methane cannot be calibrated with the built in ECO...

Page 109: ...he Ecotec E3000 can be controlled externally or measurement data or the status of the Ecotec E3000 may be communicated to external equipment Through relay change over contacts the trigger levels as well as the operating mode Ready of the Ecotec E3000 may be monitored Warning For all contacts of the I O Port a maximum voltage of 60 V DC or 25 V AC must not be exceeded or reached to ground or ground...

Page 110: ...rogrammable logic control PLC Technical data Pin assignment default All PLC inputs can be defined by the user from a list of commands The commands can be selected in the SETTINGS INTERFACES SELECT PLC INPUTS submenu For details on this submenu please refer to Section Sleep Change from LOW to HIGH to activate SLEEP function Change from HIGH to LOW to deactivate SLEEP function wake up Caution Permis...

Page 111: ...These outputs can be used to monitor the Ecotec E3000 via a programmable logic control PLC PLC Outputs are designed as an Open Collector Output or a relay output Please refer to the example given below for an open collector output Error Technical data Pin 25 Pin 13 Pin 9 Function 0 x x Gas selecting disabled 1 0 0 1st gas is selected 1 0 1 2nd gas is selected 1 1 0 3rd gas is selected 1 1 1 4th ga...

Page 112: ...please refer to Section 4 6 6 Ready Signal is LOW as long as the Ecotec E3000 is ready for measurements Leak Signal is LOW if the preset trigger level is exceeded Error Signal is LOW if a warning or error message is active 7 1 4 1 Relay outputs Technical data Open collector output Active low Pin Default Command 4 Ready 5 not used 16 Leak 17 Error Caution Maximum load rating is 60 V DC 25 V AC and ...

Page 113: ... and the relay contact NC will open respectively Ready As long as the Ecotec E3000 is ready for measurements the relay contact NO is closed and the relay contact NC is open respectively 7 1 4 2 Recorder Outputs Technical data Pin assignment For details please refer to section 4 6 2 Recorder outputs Pin Type of contact Relay Output default 10 Currentless closed NC Leak 22 Common 23 Currentless open...

Page 114: ...t signal is set to HIGH calibration will be started afterwards Alternatively the calibration may be aborted by setting the CALIBRATION ABORT input signal to HIGH When the calibration process has been started the Ecotec E3000 sets the CALIBRATION STABLE output signal to LOW after the signal had enough time to stabilize The sniffer probe tip then needs to be moved away from the test leak and the CAL...

Page 115: ... can be used for external control of the Ecotec E3000 but also for simple export of data describing testing results For how to set up the RS232 interface please refer to Section 4 6 For a detailed description of the RS232 interface and its commands please refer to the Ecotec E3000 Interface Description kins26e1 ...

Page 116: ...Description Part no Operation hours Repair level 2000 24 000 Check sinter filter and replace if necessary Sniffer tip Sinter Filter for Sniffertip SL3xx SL3000 x 5 pcs 200 03 500 X I Replace if W35 Flow too Low Sniffer tip Felt for Capillary Filter SL3xx SL3000 x 50pcs 200 001 116 I Check internal filter and replace if necessary Main Unit Internal Filter 6 pcs 200 03 679 X II Turbo pump SplitFlow ...

Page 117: ...eds to be enabled For details on how to enable the IGS mode see Section 3 6 3 7 To start the adjustment routine in measurement mode press the CAL button on the right side of the display like starting an external calibration In the opening submenu you will find an adjust IGS button on the left side of the display The Ecotec E3000 will ask to sniff air first and will then ask for the two interfering...

Page 118: ...ffer line and the built in ECO Check first Notice To prevent scratching of the front cover it is recommended to use a soft base 1 The fastener for the air filter is on the bottom of the Ecotec E3000 2 Screw out the fastener screw 3 Extract the air filter Caution The air filter should be checked for contamination at least every 6 months and should be definitely exchanged after 2 years Warning Befor...

Page 119: ...NANCE CONFIRM MAINTENANCE and confirm with the appropriate button on the right side of the display that the air filter has been replaced cleaned The actual date and time as well as the actual number of operating hours will be saved and a reminder to perform this maintenance task again will be issued after another 10 000 operating hours Notice The Ecotec E3000 must be set to ADVANCED mode for confi...

Page 120: ... place the Ecotec E3000 on its front side or position it on the edge of a sturdy bench If placing it on the edge of a bench please pay attention to its center of gravity If placing it on its front side please remove the sniffer line and the built in ECO Check first To prevent scratching of the front cover it is recommended to use a soft base 3 Open bottom lid with 19 mm ring spanner wrench and lif...

Page 121: ...g tweezers pull out Porex rods 8 pieces 5 Using tweezers insert Porex rods 8 pieces Fig 8 4 Screw out the end cover Lift out the operation fluid reservoir Fig 8 5 Removing the operation fluid reservoir Fig 8 5 Pos Description 40 Operation Fluid Reservoir 40a Porex rod ...

Page 122: ...ENANCE CONFIRM MAINTENANCE and confirm with the appropriate button on the right side of the display that the operation fluid reservoir has been replaced cleaned The actual date and time as well as the actual number of operating hours will be saved and a reminder for maintenance will be issued again after 3 years Notice The Ecotec E3000 must be set to ADVANCED mode for confirming maintenance tasks ...

Page 123: ...ng these make sure that the arrows point upwards The two fuses must be replaced by two fuses of the same rating The required mains fuses are available as cat no 200 000 914 After having exchanged the fuse s firmly reclose the lid of the mains socket Re connect the mains cord to the Ecotec E3000 and switch on the Ecotec E3000 Warning Before exchanging the fuses you must disconnect the mains cord On...

Page 124: ...g of capillary filter see Section 8 6 1 Clogging of sinter filter see Section 8 6 3 Clogging of sniffer probe capillary Damage of sniffer tip Clogging damage of sniffer line 8 6 1 Replacing the felt discs of the capillary filter 1 Switch off the Ecotec E3000 2 Unscrew capillary filter push out old filter pads from the back side Caution The Ecotec E3000 must be recalibrated after any maintenance of...

Page 125: ...he sinter filter see Section 8 3 7 From the main menu go to HISTORY MAINTENANCE CONFIRM MAINTENANCE SNIFFER TIP FILTER and confirm with the ok button on the right side of the display that the sniffer tip filter has been replaced The actual date and time as well as the actual number of operating hours will be saved and a reminder for maintenance will be issued again after the preset number of hours...

Page 126: ...nu go to HISTORY MAINTENANCE CONFIRM MAINTENANCE SNIFFER TIP FILTER and confirm with the ok button on the right side of the display that the sniffer tip filter has been replaced The actual date and time as well as the actual number of operating hours will be saved and a reminder for maintenance will be issued again after the preset number of hours For details see Chapter 4 7 8 Please recalibrate t...

Page 127: ... through capillary too low remains after releasing the finger from the capillary filter replace the sniffer tip first If this does not cure the problem the capillary in the sniffer line is clogged and the complete sniffer line needs to be replaced 10 Please recalibrate the Ecotec E3000 for most accurate display of leak rate 8 7 Switching the capillary filter At the top of the sniffer tip two diffe...

Page 128: ...er you need to remove the taper gasket The plastic capillary filter will not fit with the taper gasket installed 1 Remove the two Philips screws in the flange of the sniffer tip and remove sniffer tip 2 Take a small pin or needle about 0 5 mm and push the steel capillary out off the tip from the top Fig 8 14 Pushing out the steel capillary Fig 8 15 Capillary sticking out of sniffer tip flange ...

Page 129: ...lter do not forget to re install the taper gasket as otherwise the sniffer line will be leaky 3 Screw in metal capillary filter at the end of the sniffer tip 4 Please recalibrate the Ecotec E3000 for most accurate display of leak rate 8 8 Replacing the gas reservoir of the ECO Check Notice Please take off the lid from the new gas reservoir 48 hours before installation Due to accumulation of gas in...

Page 130: ...If the glass tube is dirty please clean it carefully 3 Screw in the new gas reservoir Fig 8 16 Removing the ECO Check reference leak from the main unit and dismounted Caution Inside of the holder is a glass tube and one O ring which protects the photocell against dirt Fig 8 18 1 Pay attention to not loose or break this glass tube Fig 8 17 O Ring ...

Page 131: ...and the ECO Check On the certificate which is delivered with the replacement gas reservoir you will find a new serial number and a 12 digit code containing the new leak rate and other leak specific information In the software menu please go to HISTORY MAINTENANCE REPLACE ECO CHECK In the opening sub menu phase enter the new serial number in the first line and the 12 digit code in the second line a...

Page 132: ... Check reference leak must be installed in the Ecotec E3000 when pressing OK Notice Entering the new leak relevant codes is important as otherwise an accurate calibration with the internal test leak and traceability of the calibration cannot be guaranteed Notice The empty container is not reusable and should be disposed off according to national law Fig 8 20 Entry screen for replacing the ECO Chec...

Page 133: ...Maintenance 8 18 kina22e chapter 8 fm technical handbook 1206 ...

Page 134: ...provides 40 unoccupied memory locations user library RAM memory Here the user may save the data of gases the parameters of which he has defined himself see User Library He may also select any gases defined earlier The library of the Ecotec E3000 contains the following gases by default Notice For each gas the default mass position is highlighted in bold Gas designation max 5 digits Other Designatio...

Page 135: ...H3F 34 0 34 0 7 0E7 33 0 34 0 7 0E7 R50 CH4 Methane 15 0 16 0 7 0E7 R113 CCIF2CCI2F 101 0 187 4 7 0E7 151 0 187 4 7 0E7 R114 CCIF2CCIF2 85 0 170 9 7 0E7 135 0 170 9 7 0E7 R115 CCIF2CF3 85 0 154 5 7 0E7 119 0 154 5 7 0E7 R116 C2F6 69 0 138 0 7 0E7 119 0 138 0 7 0E7 R123 CHCIFCF3 83 0 152 9 7 0E7 85 0 152 9 7 0E7 R124 CHCIFCF3 67 0 136 5 7 0E7 51 0 136 5 7 0E7 Gas designation max 5 digits Other Desi...

Page 136: ...0E8 R143a CF3CH3 69 0 84 0 7 0E7 65 0 84 0 3 5E8 R152a CHF2CH3 51 0 66 1 8 7E7 65 0 66 1 8 7E7 R170 Ethane C2H6 26 0 30 1 7 0E7 R218 C3F8 69 0 188 0 7 0E7 169 0 188 0 3 5E8 R236fa 64 152 0 3 9E7 69 152 0 3 9E7 113 152 0 3 9E7 133 152 0 3 9E7 R245fa CF3CH2CF2H 51 0 134 6 5E7 64 0 134 6 5E7 69 0 134 6 5E7 95 0 134 6 5E7 115 0 134 6 5E7 Gas designation max 5 digits Other Designations Meas mass xxx x ...

Page 137: ...end of 61 R22 11 R152a 28 R124 51 0 92 8 7 0E7 67 0 92 8 7 0E7 R401C Blend of 33 R22 15 R152a 52 R124 51 0 101 0 7 0E7 67 0 101 0 7 0E7 R402A Blend of 38 R22 60 R125 2 R290 51 0 101 6 7 0E7 101 0 101 6 3 5E8 R402B Blend of 60 R22 38 R125 2 R290 51 0 94 7 7 0E7 101 0 94 7 3 5E8 R403A Blend of 75 R22 20 R218 5 R290 51 0 92 0 7 0E7 69 0 92 0 3 5E8 R403B Blend of 56 R22 39 R218 5 R290 51 0 103 3 7 0E7...

Page 138: ...R407B Blend of 10 R32 70 R125 20 R134a 51 0 102 9 7 0E7 101 0 102 9 7 0E7 R407C Blend of 23 R32 25 R125 52 R134a 51 0 86 2 1 9E8 69 0 86 2 1 9E8 R407D Blend of 15 R32 15 R125 70 R134a 83 0 86 2 4 7E8 69 0 91 0 7 0E7 R407E Blend of 25 R32 15 R125 60 R134a 83 0 91 0 7 0E7 51 0 83 8 7 0E7 69 0 83 8 7 0E7 R408A Blend of 7 R125 46 R143a 47 R22 51 0 87 0 7 0E7 69 0 87 0 7 0E7 R409A Blend of 60 R22 25 R1...

Page 139: ...0E7 67 0 83 1 7 0E8 R411C Blend of 3 R1270 95 5 R22 1 5 R152a 51 0 83 4 7 0E7 67 0 83 4 7 0E8 R412A Blend of 70 R22 5 R218 25 R142b 51 0 92 2 7 0E7 65 0 92 2 3 5E8 R413A Blend of 9 R218 88 R134a 3 R600 69 0 104 0 7 0E7 83 0 104 0 7 0E7 R414A Blend of 51 R22 28 5 R124 4 R600a 16 5 R142b 51 0 96 9 7 0E7 67 0 96 9 7 0E7 R414B Blend of 50 R22 39 R124 1 5 R600a 9 5 R142b 51 0 101 6 7 0E7 67 0 101 6 7 0...

Page 140: ...51 0 87 3 3 5E8 R504 Blend of 48 R32 52 R115 85 0 79 3 7 0E7 51 0 79 3 7 0E7 R505 Blend of 78 R12 22 R31 85 0 103 5 7 0E7 87 0 103 5 3 5E R506 Blend of 55 R31 45 R114 68 0 93 7 7 0E7 85 0 93 7 7 0E7 R507A Blend of 50 R125 50 R143a 69 0 98 9 7 0E7 51 0 98 9 7 0E7 R508A Blend of 39 R23 61 R116 69 0 100 1 7 0E7 51 0 100 1 3 5E8 R508B Blend of 46 R23 54 R116 69 0 95 4 7 0E7 51 0 95 4 3 5E8 R509A Blend...

Page 141: ...7 0 72 2 7 0E7 R601c C5H12 Cyclopentane 41 0 70 1 7 0E7 R1234 HFO 1234yf 69 114 1 6E8 64 114 1 6E8 95 114 1 6E8 114 114 1 6E8 H2 Hydrogen 2 0 2 0 1 8E6 He Helium 4 0 4 0 2 4E7 NH3 R717 17 0 17 0 7 0E7 H2O R718 18 0 18 0 7 0E7 Ne Neon 20 0 20 2 7 0E7 N2 Nitrogen 28 0 28 0 7 0E7 O2 Oxygen 32 0 32 0 7 0E7 Ar Argon 40 0 40 0 7 0E7 CO2 R744 44 0 44 0 7 7E6 Kr Krypton 84 0 83 8 7 0E7 Gas designation max...

Page 142: ... HT135 Galden HT135 100 610 1 2E7 117 497 7 0E7 119 497 7 0E7 69 497 7 0E7 135 497 7 0E7 ZT130 Galden ZT130 100 497 7 0E7 69 610 1 2E7 119 610 1 2E7 169 610 1 2E7 131 610 1 2E7 Gas designation max 5 digits Other Designations Meas mass xxx x amu Molecule mass xx x amu Normalisation factor Base value x xEx ...

Page 143: ...Annex 9 10 kina22e chapter 9 fm technical handbook 1206 9 2 Declaration of Conformity ...

Page 144: ... 3 16 3 19 4 4 electrical connections 1 18 electrical connectors 7 1 error 3 12 4 34 6 1 error list 4 35 error messages 6 1 error no 6 2 external calibration 3 17 F filter 8 9 flow 1 8 4 13 4 30 4 33 6 3 8 9 8 12 flow limit 4 13 fuse 1 7 1 18 6 2 8 8 G gas flow 2 1 gas library 4 4 4 9 global trigger 4 19 4 20 H history 4 34 I I O Port 1 18 1 19 7 1 I O port 4 23 4 25 4 32 I Guide 3 8 3 9 4 18 I Gu...

Page 145: ...4 25 sniffer 4 31 sniffer light 4 21 sniffer line 1 13 1 15 2 4 4 13 4 30 8 9 sniffer probe 1 1 2 4 3 5 8 9 sniffer tip 0 7 1 9 3 6 3 10 3 15 3 16 3 18 sniffer tips 1 9 T TMP 4 30 6 1 6 2 transportation lock 1 13 trigger 4 26 turbo molecular pump 1 11 2 1 4 30 6 1 6 2 8 5 turbo molecular pump TMP 2 2 U User mode 4 17 V verification 3 14 W wake up 4 22 warning 3 12 6 1 weight 1 8 Z zero 1 12 2 4 3 ...

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