© ICSPI Corp. 2007-2021
nGauge AFM User Manual 2.0
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AFM vertical scanners are non-linear, meaning that if you are measuring over a wide
topography range, measurements for multiple step height should be taken. For example, if you
are investigating features that are 100
—500 nm tall, it is important to have a 100 nm and a 500
nm calibration grating that you can use to calibrate.
6.2.2.
Lateral Calibration
For XY calibration, it is important to have calibration gratings with pitches on the same order of
magnitude as the scan area.
For example, for calibrating scan areas such as 5, 10, 20 microns, a standard feature pitch of 3
micron would work well. For calibrating small scan areas (<1 micron), a feature pitch of 100
–
300 nm would be required.
