© ICSPI Corp. 2007-2021
nGauge AFM User Manual 2.0
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9.1.2.2.
Manual Measurement
If the step height function is not working, or does not give values that appear correct, there are a
few other methods of finding the step-height which can support the data obtained with the
critical dimension tool.
On the line profile graph, select the ‘Measure Distances in Graphs’ button
in the bottom-
right corner. A window will pop up. This will allow you to gather data at selected points in the
graph.
Select as many points in the graph as you like. As you select them, information about the points
will show up in the popup window. To know the height of the profiles, look at the Y[nm] column
Measure distances button
