© ICSPI Corp. 2007-2021
nGauge AFM User Manual 2.0
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9.1.2.
Step Height Measurement Example
9.1.2.1.
Critical Dimension Tool
With the new graph, select Graph > Critical Dimension… This allows for robust step height
measurements. Once the tool is open, select ‘Step Height (Positive/Negative)’ from a dropdown
on the right-hand side. Negative is for lines with two plateau and one valley. Positive is for lines
with two valleys and one plateau.
Critical Dimension tool location
