28
Solarus 950 Owner’s Manual and User’s Guide
O
H
2
flow rate = 6.4 sccm
O
O
2
flow rate = 27.5 sccm
O
RF Power = 50 Watts
O
Ar/O
2
(optional) parameters:
O
Ar flow rate = 35.0 sccm
O
O
2
flow rate = 11.5 sccm
O
RF Power = 50 Watts
Cleaning the Sample
1.
Touch
START
to initiate the automatic cleaning cycle. The cycle goes
through the following states:
O
Rough vacuum state
O
High vacuum state
O
Gas flow stabilization
O
Plasma cleaning state
O
Cleaning cycle completion
N
OTE
:
Touching the Display button at the bottom of the screen at any time during
a cleaning cycle will switch the screen between a graphical and numeric
display, providing information on system operating conditions.
Rough Vacuum State
2.
After touching
START
the system initiates a rough vacuum state, in which
the following events occur.
O
The chamber vent valve closes, isolating the chamber from atmosphere.
O
The three-way roughing valve activates, connecting the diaphragm pump
to the chamber for pre-pumping. The diaphragm pump is temporarily out
of the backing line for the turbo pump.
O
The system remains in the pre-pump state until the chamber reaches a pre-
set level of 20 Torr.
N
OTE
:
Errors in this state may occur if the 20 Torr preset value is not
achieved within the allowable time limit. This is most likely due to a
leak in the chamber caused by the chamber lid not seating properly,
or by not inserting the blanking plugs in the front chamber ports.
