44
Solarus 950 Owner’s Manual and User’s Guide
6.
Remove the connector from the controller.
7.
Cover the openings in the pump and the manifold with clean aluminum foil
while the pump is disconnected to prevent contamination.
8.
The pump can be installed by following the reverse of these directions.
Removing the View Port
The view port can be removed so that it or the o-ring can be cleaned or replaced.
1.
Squeeze the two holes in the viewport clamp with snap ring pliers and gently
pull the clamp out.
Calibrating the Pirani Gauge
The gauge is calibrated prior to shipment. Contamination or a long time in opera-
tion can result in a zero drift. If the gauge is severely out of calibration, it can be
calibrated in the field. This should only be done when necessary. It will not result
in the most accurate calibration because the Solarus is not designed to evacuate
the specimen chamber below 7.5 x 10
-5
Torr (1 x 10
-4
mbar). This slight miscali-
bration will not affect plasma cleaning efficiency, and the system will function
properly.
1.
Lift the lid to the specimen chamber.
2.
Remove the four screws that hold the cover to the specimen chamber lid and
remove the cover.
