32
Solarus 950 Owner’s Manual and User’s Guide
ƒigure 20
Plasma cleaning complete
N
OTE
:
Chamber is under vacuum and ready to be vented
10.
The cleaning chamber will remain under vacuum until manually vented by the
user. This keeps the sample isolated from the environment until it is removed.
N
OTE
:
The system will automatically abort the cycle if any error conditions
exist. The user should notify the lab manager to correct the cause of
the error. Any uncorrectable issues should be reported to Gatan.
Removing the Sample
1.
Touch
VENT
to vent the chamber
to atmospheric pressure for removal of the
sample. This initiates the following actions:
O
The right angle valve between the turbo pump and chamber is closed.
O
The turbo continues to be backed by the diaphragm pump and the entire
pumping system is isolated from the chamber.
O
The vent valve is opened, allowing the chamber to come up to atmo-
spheric pressure.
