Solarus 950 Owner’s Manual and User’s Guide
15
H
2
/O
2
and Ar (optional) Plasma Cleaning Configuration
For this optional configuration, three gas connections are required: H
2
, O
2
, and
Ar. See the following diagram for locations of the gas inlet ports.
ƒigure 7
Three-tank cleaning configuration
Configuring Gas 3
If a gas other than Ar is connected to the Gas 3 inlet, the system configuration
must be changed. When a mass flow controller is operated on a gas other than the
gas it was calibrated with, a scale shift will occur in the flow reading. If the orifice
size is appropriate, a new gas can be used, and scaling the flow reading results in a
reasonably accurate flow rate (+/- 5%). The Gas 3 mass flow controller is factory
calibrated for O
2
with a full scale value of 40 sccm. The Gas 3 mass flow control-
ler has been setup for Ar using the multiplier 1.412. The following conversion fac-
tors (multipliers) can be used with Gas 3:
