Solarus 950 Owner’s Manual and User’s Guide
35
Turbo Pump
Speed
Most users should not adjust this value, as it can affect cleaning effi-
ciency and damage production of the plasma.
Pumping
Timeout
Most users should not adjust this value. This limits the amount of time
the system is allowed to achieve the target vacuum state before cancel-
ing the process. Adjusting this value can be helpful to set up special
functions such as purging gas lines, however, the default purging pro-
cess under the options section is the preferred method.
Repeat
This function allows for a plasma cycle to be run over and over on the
same sample without interruption. The preferred method would be to
simply increase the cleaning time.
O
2
Gas Flow,
H
2
Gas Flow,
Ar Gas Flow
After extensive testing, the default gas flow recipes have been found to
be optimum for sample cleaning. However, there will be users who will
want to explore their own gas ratios.
C
AUTION
:
Reducing the gas flow rate may increase the heat generated
on the antenna in the plasma chamber and on the sample. Low gas flow
rates combined with raising the RF power level above 50 watts for
prolonged cleaning time can cause damage to samples and components
internal to the chamber such as the RF antenna.
Gas Flow
Timeout
This function limits the amount of time any of the gas flow rates are
allowed to fall outside the selected range before the RF process shuts
down.
Forward RF
Target
50 watts of RF power is sufficient (and, in fact, optimum) for cleaning
EM samples. The RF power level can be set as high as 65 watts. Addi-
tionally, there is a thermal relationship between power and gas flow.
Lowering the gas flow also raises the energy per particle and corre-
spondingly the temperature on the antenna.
Forward RF
Range
This setting controls how much deviation from the target value is
allowed before an RF power shutdown is triggered.
Maximum
Reflected RF
This setting should generally not be altered.
C
AUTION
:
Setting reflected RF to a high value enables the generation of
RF energy for prolonged periods with high reflected RF power, which can
stress the internal components and cause internal heating. This condition
can lead to automatic thermal shutdown. If the system is repeatedly
exceeding the default reflected RF limits, it may need service.
RF Timeout
This function limits the amount of time that any of the above three
power parameters (Forward RF Target, Forward RF Range, and Maxi-
mum Reflected RF) can fall outside the selected range before the RF
process is shut off.
RF Tuning
Attempts
This function allows the system to retry if a match is not found during
the first attempt. The default is 3 attempts.
P
ARAMETER
D
ESCRIPTION
AND
E
DITING
S
TEPS
