Gatan Solarus 950, Owner'S Manual And User'S Manual

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Solarus 950 Owner’s Manual and User’s Guide
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First check to be sure Gas 3 is configured for Ar(75%)/O
2
(25%).
1.
Touch Options . The options screen should be displayed.
2. Touch Configuration . The configuration screen should be displayed.
3.
Be sure that Gas Line 3 Enable is set to Yes .
4. Touch Gas Line 3 Name , touch Clear , touch A r / O 2 , touch Apply . This
sets the name.
5. Touch Gas Line 3 Multiplier , touch Clear , touch 1 . 2 8 , touch Apply . This
sets the MFC multiplier, which compensates for using a gas other than the gas
the MFC was calibrated for.
6.
Touch Done .
Next create the custom recipe.
1.
Select TEM Standard H2/O2 1 Min .
2. Touch Options . The options screen should be displayed.
3.
Touch Copy . This makes a copy of the recipe that can be modified.
4. Touch Title , touch Clear , touch A r / O 2 , touch Apply . This sets the title to
Ar/O2.
5. Touch H2 Gas Flow , touch Clear , touch Apply . This sets the H2 gas flow to 0
sccm.
6. Touch O2 Gas Flow , touch Clear , touch Apply . This sets the O2 gas flow to 0
sccm.
7. Touch Ar/O2 Gas Flow , touch Clear , touch 4 5 , touch Apply . This sets the
ArO2 gas flow to 45 sccm. This should result in a pressure of about 450
mTorr during cleaning.
8.
Touch Cleaning Time , set the desired time, touch Apply .
9. Touch Save .
10.
Touch Done .
To make a recipe not visible from the main screen:
1.
Select the recipe.
2. Touch Options .
3.
Touch Visible .
4. Touch No .
5.
Touch Apply .
6. Touch Done .