Edwards STP Series, Instruction Manual

Page: 9 / 177

STP-iXA2205 Series Turbomolecular Pump
Nov. 10 vii Issue 1-h
PAGE
vii
TABLES
Table Title Page
1 Environmental requirements for installation 24
2 Eyebolt size 27
3 Pump functions 32
4 Control unit front panel functions 34
5 Power unit connector panel connection 35
6 Power unit front panel function 36
7 Tightening torque of bolt 41
8 Maximum torque predicted
and recommended securing bolt for inlet port flange
42
9 Shape of reduced diameter shank bolts 45
10 Suitable parts for DC cable 48
11 Pin assignment for connector X1 49
12 Power cable 51
13 TMS unit specification 62
14 Starting/stopping the STP pump
using contact input (X2 REMOTE)
70
15 Starting/stopping the STP pump
using voltage input (X2 REMOTE) (voltage input)
71
16 Reset Operation (X2 REMOTE) 72
17 LED Indications for each state 73
18 X2 REMOTE input signal pins 75
19 X2 REMOTE input signal pins (continued) 76
20 X2 REMOTE input signal pins (voltage input) 78
21 X2 REMOTE input signal pins (voltage input) (continued) 79
22 Input operation port setting 81
23 Rotation INHIBIT signal input 82
24 X2 REMOTE output signal pins 84
25 Rated contacts for relays CR1 to CR8 86
26 X3/X4 pin position 90
27 Communication parameters 93
28 Input operation port 94
29 Serial communication time out setting 95
30 Transmission control characters 97
31 Pump operation commands 105
32 Command list 106
33 Pump operation commands 108
34 Error message values 110
35 Error message values (continued) 111
36 Pump operation mode 113
37 Remote mode 118
38 Warning value bit assign 122
39 Parameter setting value 127
40 Functions of STP-Link 137
41 States of LEDs and X2 REMOTE output signals
at power failure
140
42 WARNING function 143
43 Default setting of WARNING function 147
44 Factory Setting and Variable Range 147
45 Priority of failure signal 149
46 Error List 150