STP-iXA2205 Series Turbomolecular Pump
Nov. 10
150
Issue 1-h
7
SAFETY
FUNCTIONS
Referre
d
Section
3.4.4
3.9
3.4.1
2.1
2.1
4.4.2
2.1
Coun
ter
m
ea
sures
1.
Remo
ve
ex
te
rnal
vi
bration
so
a
s
no
t t
o
tr
an
sm
it
it
to
the
STP
pump.
2.
Che
ck
the
va
cuum
pi
ping.
3.
Install
the
STP
pump
in
a
wa
y
that
no
foreig
n
materials
fall
into
the
STP
pum
p.
4.
Perform
roug
hing
vacuum
throug
h
bypa
ss
root.
Contac
t Serv
ic
e offic
e.
1.
Use
the
maxi
mum
wo
rki
ng
pre
ssure
or
le
ss.
2.
Use
the
allo
wable
ba
cking
pre
ssure
or
le
ss.
3.
Che
ck
the
va
cuum
pi
ping
system
for
le
aka
ge.
4.
Che
ck
the
ba
cki
ng-pum
p
for
its
ca
pa
city
and
STA
R
T
state.
(use
a
ba
cki
ng-pu
m
p
with
the
recomme
nded
cap
acit
y
or
more)
Probable
ca
uses
Exce
ssive
vib
ration
ap
plied
externall
y
to
the
STP
pump
:
1.
Extern
al
vib
ra
tion/impact.
2.
Atmosph
eri
c
air
flows
into
the
STP
pump.
3.
Forei
gn
mate
rials
fall
into
the
STP
pump.
4.
Sudden
pr
es
sure
ch
ang
e
at
start
of
rou
ghing
Abnorm
al
ma
gnetic
beari
ng:
1.
Control
ci
rcuit
erro
r.
2.
Disco
nne
ctio
n
of
the
internal
wiring.
1.
High
pr
es
sure
at
the
inlet
port.
2.
High
pr
es
sure
at
the
outlet
port.
3.
Lea
kag
e
of
the
piping
sy
st
em.
4.
Failure
of
the
backin
g-p
um
p.
Occurr
enc
e
condition
Ex
ce
ss
ive
imbalan
ce
Accel
eration
state
contin
ue
s
for
approx.
30
minutes
Pump
ope
ration
Dec
elerate
and
stop
Dec
elerate
and
stop
(Error
mess
age)
Distu
rba
nce
X_H
Distu
rba
nce
Y_H
Distu
rba
nce
X_B
Distu
rba
nce
Y_B
Distu
rba
nce
Z
DRV
O
ve
rlo
ad
"FAILU
RE"
LED
1
flash
in
red
2
flashe
s
in
red
Table
46
-
Error
List
