
STP-iXA2205 Series Turbomolecular Pump
Nov. 10
45
Issue 1-h
INSTALLATION
3
Refer to Figure 32 for the shape of Reduced Diameter Shank Bolts (R.D.S.B.)
ISO_F flange
VG/ICF flange
1. Vacuum equipment
2. Clearance made by cantering
3. Pump flange
Figure 32 - Shape of reduced diameter shank bolts
Use Table 9 in conjunction with Figure 32. Ensure that the surface of the levelled and smoothed area
(expressed by "D" in Figure 32) is free of crack, depression, and other damages. Also, when you
want to use commercially-available screws, be sure to thoroughly grind them so as not to leave spiral
seams on their bottom.
Bolt size
Type of flange
T
D
R
M8
ISO_F flange
2.5 mm or more
5.9 mm or more
0.8 mm or more
ICF flange
1 mm or more
M10
ISO_F flange
3 mm or more
7.5 mm or more
VG flange
1.5 mm or more
M12
ISO_F flange
3.5 mm or more
9.1 mm or more
VG flange
2 mm or more
Table 9 - Shape of reduced diameter shank bolts
1
R
T
3
2
D
D
R
T