STP-iXA2205 Series Turbomolecular Pump
Nov. 10
32
Issue 1-h
INSTALLATION
3
3.3
Name and function of each part
3.3.1 Name and function of the pump
The STP pump in Figure 22 is a typical pump model. Refer to Section 2, "TECHNICAL DATA".
(A) STP-iXA2205C(V)
(A) STP-iXA2205CP(V)/CIP
Figure 22 - Configuration of the STP pump
Item
Description
Function
1
Inlet port flange
Connected to the vacuum equipment (at the high vacuum side).
2
Outlet port flange
Connected to the inlet port side of the backing-pump.
3
Purge port
Introduces a purge gas.
In order to protect the inside of the STP pump when pumping
reactive or corrosive gases.
The STP pump is delivered with a blank flange attached to this
port.
4
Cooling water port
(water cooling unit)
Connected to the STP pump cooling water pipe.
5
Control unit
Contains the electronics that control the pump. Refer to Section
3.3.2, "Name and function of the control unit, for details.
6
Power unit
The power supply is incorporated. Refer to Section 3.3.3, "Name
and function of the power unit" for details.
*1
Depending upon the pump model, the TMS unit (optional accessory) is not available. Refer to Section 2, "TECHNICAL
DATA" for more detailed information.
Table 3 - Pump functions
1
2
5
3
4
1
2
5
3
4
3
6
