STP-iXA2205 Series Turbomolecular Pump
Nov. 10
152
Issue 1-h
7
SAFETY
FUNCTIONS
Referre
d
Section
Coun
ter
m
ea
sures
Contac
t Serv
ic
e offic
e.
1.
Perform
re-st
art
ope
ration
after
res
etting.
2.
Conta
ct
Servi
ce
office.
Contac
t Serv
ic
e offic
e.
Contac
t Serv
ic
e offic
e.
Contac
t Serv
ic
e offic
e.
Contac
t Serv
ic
e offic
e.
Contac
t Serv
ic
e offic
e.
Contac
t Serv
ic
e offic
e.
Probable
ca
uses
Failure
of
the
control
unit.
1.
Malfunctio
n
by
exte
rnal
noise.
2.
Failure
of
the
control
unit.
Failure
of
the
control
unit.
Failure
of
the
control
unit.
1.
Short-circuit
or
gro
und
faul
t
in
the
motor
windi
ng.
2.
Failure
of
the
control
unit.
Failure
of
the
control
unit.
1.
Wea
r-out
of
the
co
oling
wa
te
r
be
ari
ng
.
2.
Failure
of
the
control
unit.
1.
Failure
of
the
STP
pump.
2.
Failure
of
the
control
unit.
Occurr
enc
e
condition
The
rotatio
n
doe
s
not
stop
after
30
min.
into
bra
ke
state
Stop
Dec
elerate
and
stop.
Comm
uni
cati
on
failure
with
motor
control
boa
rd
Mo
to
r
dr
iv
er
o
ver
cur
re
nt
Mo
to
r
dr
iv
er
o
ver
voltag
e
Dec
elerate
and
stop.
Touch
do
wn.
The
magneti
c
bea
ring
output
stop
s
and
the
rotor
is
desce
nde
d
on
the
touch
do
wn
beari
ng.
Pump
ope
ration
Dec
elerate
and
stop
Ac
ce
lerate
up
to
2000
rpm
or
le
ss.
Comm
uni
cati
on
failure
in
the
control
unit
Dec
elerate
and
stop
Free
run
*1
Free
run
*1
Cooli
ng
fan
come
to
a
stop.
Ex
ce
ss
ive
magneti
c
bea
ring
elec
tric
current
contin
ue
s
for
30
se
c.
(Error
mess
age)
Aberrant
Bra
ke
Ac
c M
al
fu
nc
tio
n
AMB
Com.
Failure
DRV
C
om.
Failure
DRV
O
ve
rc
ur
rent
DRV
O
ve
rvoltage
FAN
Tro
uble
Inordint
Curre
nt
"FAILU
RE"
LED
S
teady
red
*1
The driver ou
tput stops and th
e rotor continue
r
otati
ng
by
inertia.
It
may
take
several
hours
to
stop.
To
stop
the
STP
pump
quickly,
close
the
vacuum
valve
at
the
out
let port flange an
d introduce gas fr
o
m
the purge
port
into the S
TP pu
mp.
Table
48
-
Error
List
(co
ntin
ued)
