STP-iXA2205 Series Turbomolecular Pump
Nov. 10
128
Issue 1-h
5
SERIAL
COMMUNICATION
PROTOCOL
Example:
1. Input operation port:
01
hex
= I/O REMOTE
2. TMS Option:
FF
hex
= DISABLE
4. Second Damage Limit Option:
00
hex
= ENABLE
5. First Damage Limit Warning:
00
hex
= ENABLE
6. Pump Runtime Over Warning:
FF
hex
= DISABLE
7. Pump Runtime Over Warning hours:
000003E8
hex
= 1,000 (×100 hours)
8. Imbalance Warning:
00
hex
= ENABLE
9. Pump Overload Warning:
FF
hex
= DISABLE
10. Pump Overload Warning Motor current:
03E8
hex
= 1,000 (×0.1%)
11. Pump Overload Warning Rotational speed: 0000
hex
= 0 (×0.1%)
12. Serial communication time out:
003Chex = 60 sec.
Parameter
1
2
3
4
5
ASCII
0 1 F
F
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
0 0 0 0
HEX
30 31 46 46
30 30 30 30
Parameter
6
7
8
ASCII
F F 0
0 0 0 0
3
E
8
0
0
HEX
46 46 30 30 30 30 30 33 45 38 30 30
Parameter
9
10
11
12
13
ASCII
F F 0
3 E 8 0
0
0
0
0
0
3
C
*1
*1
*1
*1
*1
*1
HEX
46 46 30 33 45 38 30 30 30 30 30 30 33 43
Parameter
13
ASCII
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
HEX
*1
System reservation.