STP-iXA2205 Series Turbomolecular Pump
Nov. 10
i
Issue 1-h
PAGE
i
CONTENTS
Section
Title
Page
1
INTRODUCTION
1
1.1
Scope and definitions
1
1.2
Applied standards
2
1.3
Limited warranty
2
1.3.1
Warranty period
2
1.3.2
Item warranted
2
1.3.3
Disclaimer
3
1.3.4
Spare parts
3
1.4
Precautions for safe operation of the STP pump
4
1.4.1
Usable gases
4
1.5
Maintenance and inspection precautions
5
1.6
Labels
5
1.7
Operation principle of the STP pump
8
1.8
STP pump specification
10
2
TECHNICAL DATA
13
2.1
STP pump specifications
13
2.2
Maximum gas flow-rate
14
2.3
Water cooling use condition
14
2.4
Control unit
15
2.5
Power unit
16
2.6
External appearance of the STP pump
17
2.7
External appearance of the power unit
20
2.8
Label affixing positions
21
3
INSTALLATION OF THE STP PUMP
23
3.1
Precautions before installation
23
3.1.1
Operating environment
23
3.1.2
Installation area
25
3.1.3
Bench
26
3.1.4
Insulation test
26
3.2
Unpacking
27
3.2.1
Unpacking the STP pump
27
3.3
Name and function of each part
32
3.3.1
Name and function of the pump
32
3.3.2
Name and function of the control unit
33
3.3.3
Name and function of the power unit
35
3.4
How to install the STP pump
37
3.4.1
Cleaning the seal
39
3.4.2
STP pump installation positions
40
3.4.3
Secure the STP pump
41
3.4.4
Legs for securing the base
46
3.5
Installation of the power unit
47
3.6
External power supply unit
48
3.7
DC cable for external power supply unit
48
