Edwards STP Series, Instruction Manual

Page: 23 / 177

STP-iXA2205 Series Turbomolecular Pump
Nov. 10 13 Issue 1-h
TECHNICAL
DATA
2
2 TECHNICAL DATA
2.1 STP pump specifications
The values shown below are typical. They are not guaranteed.
Item
STP-iXA2205C
STP-iXA2205CV
STP-iXA2205CP
STP-iXA2205CPV
STP-iXA2205CIP
Inlet port flange ISO250F / VG250 / ICF305 Flange size
Outlet port flange KF40
Pumping speed N
2
L/s 2200
Ar L/s 1900
H
2
L/s 1700
Compression ratio N
2
>10
8
H
2
1×10
4
Ultimate pressure Pa (Torr) 10
-7
(10
-9
) [after baking]
Allowable backing pressure Pa (Torr) 266 (2)
Flow rate of purge gas <N
2
> Pa·m
3
/s
(SCCM)
8.4×10
-2
(50)
Rated speed rpm 27,000
Backup rotational speed
*1
rpm Approximately 5,000
Starting time min
㻡 8
Stopping time min
㻡
11
Noise dB < 55 (27,000 rpm)
Baking temperature °C <120
Lubricating oil Not necessary
Installation position Free
Cooling method Water cooling
Mass
*2
kg 61 75
Ambient temperature range °C 0 to 40
Storage temperature range °C -25 to 55
*1
A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.
*2
Mass is a value of state that the only standard accessory was installed (except the optional accessory).