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Edwards iXM Series, Instruction Manual

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10.  Storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  89

11.  Disposal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   90

12.  Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   91

12.1  Return the equipment or components for service . . . . . . . . . . . . . . . . . . . .   91

13.  Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   93

13.1  Disconnect box. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   93
13.2  Accessory modules. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  93
13.3  Pump Display Terminal (PDT). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   93
13.4  PDT holster. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   94
13.5  PDT extension cable. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   94
13.6  Seismic restraint brackets. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   94
13.7  Nitrogen flow switch assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   94
13.8  Interface modules. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   95

13.8.1  MicroTIM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   95
13.8.2  EMS modules. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  95
13.8.3  iGateway modules. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   95

13.9  Exhaust check valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   96
13.10  Exhaust extraction cover kit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   96
13.11  Constant flow water valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   96
13.12  Water flow monitor assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  97

10/2020 - ©Edwards Limited

Page 6

M56635880_D

Summary of Contents for iXM Series

Page 1: ...Dry Pump System iXM INSTRUCTION MANUAL M56635880_D Original instructions edwardsvacuum com...

Page 2: ...of this manual may change from time to time without notice We accept no liability for any errors that may appear in this manual nor do we make any expressed or implied warranties regarding the content...

Page 3: ...to electrical sub assemblies 2014 30 EU Electromagnetic compatibility EMC directive 2006 66 EC Batteries directive 2011 65 EU Restriction of certain hazardous substances RoHS directive as amended by...

Page 4: ...ce release To the best of our knowledge the materials used comply with the requirements of REACH The product manual provides information and instruction to ensure the safe storage use maintenance and...

Page 5: ...O O Motors pump and mechanical booster X O O O O O Pump and booster X O O O O O Electronics and Controls X O X O O O Cooling system X O O O O O Purge system X O O O O O O GB T 26572 O Indicates that...

Page 6: ...arimode 122 8 Varimode 157 Voltage variant 8 200 230 V 9 380 460 V Dry pump and booster combination 0 XM200 SG pump only 1 XM200 Xcede pump only 2 XM200 SG MB600 3 XM200 Xcede MB600 4 XM200 SG MB1200...

Page 7: ...stallation 25 4 1 Installation safety 25 4 2 Unpack and inspect 26 4 3 Position the system 27 4 4 Install the system 29 4 5 Lubrication 31 4 6 Connect the system 31 4 6 1 Connect to the vacuum and exh...

Page 8: ...ough the front panel control 63 6 2 5 Controlled stop 63 6 3 Gas module configuration 64 6 3 1 iXM Varimode gas module adjustment procedure 64 6 4 System operating temperature configuration 65 7 Maint...

Page 9: ...13 4 PDT holster 94 13 5 PDT extension cable 94 13 6 Seismic restraint brackets 94 13 7 Nitrogen flow switch assembly 94 13 8 Interface modules 95 13 8 1 MicroTIM 95 13 8 2 EMS modules 95 13 8 3 iGat...

Page 10: ...XM3000 31 Figure 9 Connect the pump inlet iXM200 and iXM3000 33 Figure 10 Connect the pump inlet iXM600 and iXM1200 34 Figure 11 Mains input supply connector 40 Figure 12 Method for connecting phase w...

Page 11: ...safety operation or maintenance of the device please contact our nearest subsidiary Important safety information is highlighted as warning and caution instructions Obey these instructions WARNING If...

Page 12: ...rd from a hot surface Warning Protective earth ground Earth point for electrical equipment Warning Use protective equipment Use appropriate protective equipment for the task 45o MAX Warning Maximum an...

Page 13: ...600 m3 hr 1200 m3 hr 3000 m3 hr The pumps are compatible for 200 230 V or 380 460 V supply Figure 1 Front view of system 1 Front panel control 2 Levelling feet 4 off 3 Castors 4 off 4 Seismic bracket...

Page 14: ...yellow 3 Ethernet connection 4 Power LED green 5 System interface connection 6 Warning LED yellow 7 Running and alarm LEDs 2 colours either green or red 8 USB connection 9 Accessory interface connect...

Page 15: ...applications it can be necessary to adjust the system operating temperatures to align with process demands Contact your supplier to discuss the requirements and refer to System operating temperature...

Page 16: ...ping perform ance hours 0 75 3 0 75 3 T variant Performance Typical peak pumping speed no gas purge cold pump m3 h 1 2800 1030 930 600 200 Average ultimate pressure No gas purge mbar 0 001 0 0015 At 4...

Page 17: ...t 40 C Maximum operating altitude m 2000 Enclosure protection when in stalled IEC60529 IP11D Pollution degree EN61010 2 Intended use Indoor 3 3 Manufacturing materials Table 3 Materials in contact wit...

Page 18: ...3 4 Loading data Figure 4 Centre of gravity and levelling foot loads iXM200 10 2020 Edwards Limited Page 15 M56635880_D M56635880_D Technical data...

Page 19: ...Figure 5 Centre of gravity and levelling foot loads iXM600 and iXM1200 10 2020 Edwards Limited Page 16 M56635880_D M56635880_D Technical data...

Page 20: ...2 71 5 38 3 Centre of gravity A 924 588 6 588 6 588 6 588 6 575 mm B 415 278 7 298 4 300 4 278 7 266 5 C 216 81 8 86 8 87 81 8 111 2 D 427 183 6 183 6 183 6 183 6 218 E 573 322 1 326 326 9 322 1 214...

Page 21: ...e Fixed flow Total flow 4 5 5 6 6 7 Exh SS Off Off Nominal individual flow 0 0 0 0 0 0 Total flow 0 Green Running Nominal individual flow 0 0 0 0 4 4 Total flow 0 On Min Running Nominal individual flo...

Page 22: ...c 200 230 or 380 460 see rating plate Frequency range Hz 50 60 Wiring configuration 3 wire plus earth ground Branch circuit protection requirement Current rating refer to Table Pump elec trical data F...

Page 23: ...9 14 002 2701 2 5 8 mm2 fine stran ded wire Hood part number 09 30 006 0442 or Insert type is Weidm ller 1789980000 2 5 8 mm2 fine stranded wire Hood part number 1652680000 VDE 0295 class 5 re fer to...

Page 24: ...lve drive transis tor open collector Gate valve position sense Pin 7 Closed Pin 8 Open Power supplies Pin 12 Accessory 24 V supply Pin 13 Accessory 24 V supply Pin 5 0 V supply common 24 V d c 0 75 A...

Page 25: ...als in contact with cooling water Stainless steel and fluoroelas tomer Stainless steel Nitrile PTFE and fluoroe lastomer Water inlet connection 3 8 inch BSP male quick connector Water outlet connectio...

Page 26: ...e m3 0 423 0 122 0 077 Free air volume of enclosure m3 0 265 0 072 0 040 Air changes per minute 24 9 27 9 50 0 Hardware configuration 100 mm duct connected to port on top of enclosure Exhaust extracti...

Page 27: ...3 6 00 Pass Arsine AsH3 0 02 0 05 0 0125 5 3 0 01 Pass Boron Trichloride BCl3 1 5 1 25 5 3 0 60 Pass Chloride Trifluor ide ClF3 0 04 0 1 0 025 5 3 0 02 Pass DCS SiCl2H2 1 5 1 125 5 3 0 60 Pass Diboran...

Page 28: ...ere is any doubt refer to the Vacuum Pump and Vacuum System Safety Manual publication number P40040100 supplied with the system The system must be installed by engineers trained by us We can train use...

Page 29: ...Do not lift the pump using this handhold CAUTION ENVIRONMENTAL SAFETY Risk of damage to environment Obey all national and local legislation concerning the impact of the pump on the environment when yo...

Page 30: ...ce is uneven or has obstacles lift the system with the correct lifting equipment If lifting the system is impractical or there are other site difficulties contact us for advice 45o MAX WARNING PAIRED...

Page 31: ...is level and is not supported by the castors The recommended jacking height is 5 mm Refer to Figure Front view of the system 4 Remove the lifting eyebolts and replace them with the lifting eyebolt hol...

Page 32: ...supplied between the seismic brackets and the bolt or stud Make sure that the bolt spacing is sufficient for the floor strength and expected loads The system has mounting points to attach four seismic...

Page 33: ...Figure 7 Reduce the effective system footprint 10 2020 Edwards Limited Page 30 M56635880_D M56635880_D Installation...

Page 34: ...CES Risk of burns Do not touch the pump exhaust or check valve while the pump is running The high temperatures of pump parts can cause harm Let the pump cool before you disconnect the pump WARNING PRE...

Page 35: ...flexible pipelines in the vacuum pipeline to decrease the transmission of vibration and to prevent loading of coupling joints We recommend to use the braided flexible pipelines For T variants make su...

Page 36: ...stem A For iXM200 and iXM3000 variants use the O ring supplied and applicable nuts bolts and washers not supplied to connect the inlet flange The inlet O ring is supplied with the pump and is installe...

Page 37: ...ring seal and clamp supplied to connect the exhaust outlet on the exhaust pipe to the exhaust extraction system Refer to Figure Controls connectors on the rear of the system 4 6 4 Connect to the facto...

Page 38: ...and manage these risks as part of the process tool installation The severity of the risks and the necessary control measures will depend on if the tool exhaust is in the flammable region this is part...

Page 39: ...maximum flow rate for the flammable gases vapours that can occur For example if a mass flow controller is being used to supply flammable gases to the process assume a flow rate for flammable gases th...

Page 40: ...ment is applicable for Installation Category II as defined in IEC 60664 1 The system must be connected to an isolator that disconnects all current carrying conductors and can be locked out in the off...

Page 41: ...rs can cause high earth leakage current Refer to Table General electrical data Note With respect to European Electromagnetic Compatibility EMC requirements for harmonics and flicker the iXM must be tr...

Page 42: ...n the contact chamber 5 For the three live conductors L1 L2 L3 carefully remove the cable insulation to the exact dimension specified in Figure Method for connecting phase wires Do not twist the cable...

Page 43: ...ck 10 L2 11 L1 12 L3 1 Cable gland 2 Hood 3 3 Phase main cable 4 Earth 5 Protective earth 6 B1 7 A2 8 A1 9 Connector block 10 L2 11 L1 12 L3 Torque settings for connector pins Cable size mm2 Maximum t...

Page 44: ...ration Figure 14 Mains connector on pump bulkhead Pin identification Pin A1 Phase 1 Pin A2 Phase 2 Pin B1 Phase 3 Pin B2 Not connected Pin PE Protective earth 10 2020 Edwards Limited Page 41 M56635880...

Page 45: ...ing pin 3 Insert stranded wire 4 2 5 mm hex Allen key 1 Mounting screw 2 Coding pin 3 Insert stranded wire 4 2 5 mm hex Allen key Pin identification Pin 1 Phase 1 Pin 2 Phase 2 Pin 3 Phase 3 Pin 4 Not...

Page 46: ...ns to install the electrical supply cable Turn the locking screws to loosen the locking mechanism if necessary Move the locking mechanism as far as possible to the left Push up the lever to release th...

Page 47: ...2 off 5 Protective cover 4 6 7 Connect an additional RF earth ground optional We recommend that you to connect an additional RF Radio Frequency earth if the system is operated in an area subject to hi...

Page 48: ...e system If the EMS link plug is not installed the system will not operate Emergency off EMO functionality If EMO functionality is necessary for example for the requirements of SEMI S2 install the pum...

Page 49: ...ectors on the rear of the system 5 Install a water flow meter into the water supply line close to the pump and then connect the water supply hose to the cooling water inlet Refer to Figure Controls co...

Page 50: ...ater cooling system data If more time is required to adjust the water flow rate access the Test Mode option again and select Disabled Press Enter Access the Test Mode option one more time and select W...

Page 51: ...PURGE Risk of injury If you use the nitrogen purges to dilute dangerous gases to a safe level make sure that the system shuts down if the nitrogen supply to the system fails If the sensors or micropro...

Page 52: ...illuminate If the Light Emitting Diodes LEDs do not illuminate contact us 2 Switch on the cooling water and nitrogen supplies 3 Make sure that the exhaust extraction system is not blocked for example...

Page 53: ...s can be installed on the pump Figure 19 Pump display terminal LEDs Local Control Illuminates green continuously when the PDT has control of the pump Pump On in the Pump Start Button Illuminates green...

Page 54: ...is necessary press down arrow Press ENTER to confirm Pump stops Stopped or Run ning Off No PDT Control Press CANCEL Press CANCEL No change Warning and alarm display and acknowledgement Each new warni...

Page 55: ...are displayed press up down keys to scroll By default there are four parameters displayed in the Normal menu and these can be changed through the Edit Display attributes menu accessed from the Setup m...

Page 56: ...inverter temperature DP INV TEMP 100 C Booster inverter temperature MB INV TEMP 100 C Dry pump exhaust pressure EXHAUST 5 PSI Dry pump exhaust temperature EXH PIPE 100 C Dry pump exhaust gas temperatu...

Page 57: ...st Mode Test Mode This option requires a security code to access it Time is set automatically when connected to a Fabworks network COMMANDS menu 1 Press up down keys to scroll Press ENTER to open a su...

Page 58: ...sub menu 2 Press CANCEL to return to the SETUP menu Table 25 USB menu USB acquire logs USB upgrade USB configuration USB acquire logs menu Data Log On board data log which shows parameters status and...

Page 59: ...aaa is the alarm code and wwww is the warning code Refer to Inverter warnings and alarms on page 83 for more information about inverter warnings and alarms Table 26 INV FAULT HIST Display Inverter Fau...

Page 60: ...Configuration menu Table 28 IP Configuration menu Host_Name display only DHCP Enable Enabled Disabled IP Address xxx xxx xxx xxx Address Mask xxx xxx xxx xxx Gateway xxx xxx xxx xxx DNS Server xxx xx...

Page 61: ...election menu Top Page 1 Bottom Page 1 Top Page 2 Bottom Page 2 UNITS Units to display menu 1 Press up down keys to scroll Press ENTER to open a sub menu 2 Press CANCEL to return to the Display attrib...

Page 62: ...Make sure it is safe to start the system and there is no maintenance activity on components downstream of the system WARNING ELECTRICAL HAZARD Risk of electric shock After the power is applied all mai...

Page 63: ...MicroTIM To operate the system through a MicroTIM 1 If the system is to be operated by customer control equipment through the MicroTIM make sure that no other devices have control of the system If th...

Page 64: ...ton 6 Local control LED green 7 Power LED green 8 Warning LED amber 9 Alarm LED red 10 Green Mode LED green 11 PDT Pump Display Terminal connection 1 EMS controlled stop button 2 Running LED green 3 S...

Page 65: ...connect the Pump Display Terminal Do not release control from the Pump Display Terminal or front panel This can result in the system being started by another module WARNING ROTATING PARTS Risk of inju...

Page 66: ...Auto or Fast shut down mode 6 2 4 Shut down through the front panel control 1 Press and hold the STOP button Figure Front panel controls for 5 seconds to stop the pump in Auto shut down mode recommen...

Page 67: ...efault nominal 44 slm setting then 1 With the PDT command select the N2 flow warning menu provided that the pump is running and there is flow above 10 slm Wait up to 30 seconds to make sure N2 flow is...

Page 68: ...et DP Temp press Enter 4 Scroll to desired temperature Press Enter Note The Dry Pump set point is the desired surface temperature of the internal low vacuum stage Refer to Table Dry pump and booster t...

Page 69: ...ou do the maintenance to the pump WARNING HOT SURFACES Risk of burns Do not touch the pump exhaust or check valve while the pump is in operation since the temperatures of these parts can be high These...

Page 70: ...em for decommissioning on page 86 and Drain the cooling water for decommissioning on page 87 Maintenance must be carried out by our service centres refer to Service on page 91 The frequency of mainten...

Page 71: ...owledgement on page 51 for more information on how warnings are handled by the PDT Table Warnings lists the warning messages that can be displayed on the PDT with possible causes and actions which sho...

Page 72: ...n page 73 Check Exh Pipe Thermistor Warning 152 01 Valve Not Shut on page 74 Check Gate Valve Warning 153 01 Valve Not Open on page 74 Check Gate Valve Warning 161 01 GV Missing on page 74 Check Gate...

Page 73: ...r filter is possibly blocked Remedy Check the nitrogen supply is connected and set to on and that pipelines and filters are not blocked Fault Warning 35 11 N2 Purge High Cause The Nitrogen supply flow...

Page 74: ...isconnected or failed Remedy Check that the sensor is installed and is correctly connected Cooling water data on page 21 Fault Warning 54 13 Sensor Fault Cause Sensor is faulty short circuit Remedy Ch...

Page 75: ...21 Fault Warning 57 13 Sensor missing Cause The dry pump end cover temperature sensor has possibly become disconnected or failed Remedy Check that the sensor is installed and is correctly connected F...

Page 76: ...ing 70 13 Sensor Fault Cause Sensor is faulty short circuit Remedy Contact us Fault Warning 71 13 AC Sup Missing Cause The pump controller cannot communicate with the accessory module Remedy 1 Check t...

Page 77: ...Remedy 1 Make sure that the sensor is installed and is correctly connected 2 If this warning continues contact supplier Fault Warning 176 01 MB zzzzzzzzzzzzz Cause Booster Inverter gives warning code...

Page 78: ...ing solenoid valve is faulty short circuit Remedy Contact us Fault Warning 192 01 Valve Missing Cause The DP end cover cooling solenoid valve is disconnected or missing open circuit Remedy Make sure t...

Page 79: ...the alarms are cleared the alarm LEDs extinguish 8 2 2 PDT alarms If a PDT is installed each alarm causes an alarm message to be displayed Refer to Warning and alarm display and acknowledgement on pag...

Page 80: ...umping system is restarted Fault Alarm 1 01 Sys Config Fault Cause The pump system type has not been set properly Remedy Contact us for a service engineer to configure the pump system type correctly o...

Page 81: ...The exhaust pipe temperature has reached the maximum allowed limit so the dry pumping system has stopped Remedy Refer to Warning 84 11 Exh Temp High on page 73 for causes and actions Fault Alarm 174 1...

Page 82: ...Alarm conditions CAUTION LOSS OF WARRANTY If Run til crash is selected the pump s can get damaged and all the warranties are invalidated on the system equipment Normally if an alarm condition exists t...

Page 83: ...fer to Table Pump protection sensors Table 36 Pump protection sensors Sensor Warning condition trig gered C Alarm condition triggered C Exhaust pressure transducer All variants 0 35 barg 5 psig 0 55 b...

Page 84: ...the system should be examined and the reason for the alarm identified Once the fault has been corrected the system should be left for a minimum of 30 minutes before attempting to restart 8 4 Events 8...

Page 85: ...ning does not disappear power cycle the pump 3 If the warning re appears after power cycling contact us Fault Event 255 63 Accessory oload Cause Faulty equipment has just been plugged in Remedy 1 Exam...

Page 86: ...y Description Recommended action 0123456789012 0800 0000 NO_INV_PARAMS No inverter parameters set loa ded No inverter parameters set loaded 0000 0010 POWER_DOWN___ Supply voltage collapsed power off C...

Page 87: ..._OVERLOAD_ Motor overload Pump Seized overload Motor overload Pump Seized overload A 1000 W 0000 D1 8000 D2 0000 INV_COMMSLOSS Loss of communications be tween drives in dual inverter Loss of communica...

Page 88: ...y have been exposed to temperatures greater than 260 C Refer to Edwards Safety Data Sheets for more information Make sure that the maintenance technician knows the safety procedures related to the pro...

Page 89: ...must be taken to prevent prolonged skin contact with these substances Use of correct protective gloves and clothing along with a respirator is recommended if contact with the substance is possible Sys...

Page 90: ...ipment PPE can decrease the risks of injury or death to personnel and damage or destruction to equipment or products Wear the correct PPE necessary for the task WARNING HOT SURFACE Risk of burn injury...

Page 91: ...oling water supply on page 45 9 4 Transportation WARNING OIL LEAKAGE Do not drain the oil from the pump s if dangerous substances have been pumped or not Blanking plates must be installed to seal all...

Page 92: ...ilure to do so can cause the cooling water to freeze in the system and damage the pump s and or the cooling water pipelines Store the system as follows 1 Obey the procedure given in Relocate the syste...

Page 93: ...notification for the presence of perchlorate Perchlorate Material special handling can apply refer to www dtsc ca gov hazardouswaste perchlorate Refer to Service on page 91 for more information Dry pu...

Page 94: ...ld and testing to factory specifications Equipment which has been serviced repaired or rebuilt is returned with a full warranty The local Service Centres can also give our engineers to support on site...

Page 95: ...ot apply to the lubricant in pump oil reservoirs Download the latest documents from edwardsvacuum com HSForms follow the procedure in HS1 fill in the electronic HS2 form print it sign it and return th...

Page 96: ...ailable for the iXM dry pump system The Active Accessory Module AAM gives connectivity for up to three directly connected accessories including a gate valve abatement and water flow sensor It also giv...

Page 97: ...m D37370597 13 6 Seismic restraint brackets Installations requiring seismic restraints Table 44 Seismic brackets Variants Mounting points Item number Standard and T variant Sides 4 off A50882000 Front...

Page 98: ...by Beckhoff Automation GmbH Germany 13 8 2 EMS modules Tool specific controlled stop interfaces Table 47 Tool specific EMS modules EMS Modules Item number SPI D37370310 MCM D37370320 LAM D37370350 C3...

Page 99: ...cover kit can be used to make sure safe gas extraction in the case of a leak from the pump s exhaust line Table 50 Exhaust extraction cover kits Item Item number NW25 Exhaust extraction cover kit A508...

Page 100: ...he water flow monitor assembly gives water flow rate which displays on PDT Table 52 Water flow monitor assembly Item Item number Water flow monitor assembly A50799000 10 2020 Edwards Limited Page 97 M...

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