Edwards iXM Series, Instruction Manual

Page: 26 / 104

3.9 Tracer gas analysis
Tracer gas fugitive emission testing has been carried out in accordance with the SEMI S6
Standard.
Table 13
Tracer gas test parameters
Test parameters
Tracer gas
N
2
O (Nitrous Oxide)
Tracer gas concentration 100%
Tracer gas release rate 5 slpm (standard litres per minute)
Tracer gas release points Exhaust flange on the iXM200/iXM600/iXM1200 pump
Process gas Nitrogen
Table 14 Tracer gas test system parameters
System parameters Units iXM3000 iXM1200
iXM600
iXM200
Extraction flow rate:
From port on top of enclosure
From port on exhaust extraction kit
m
3
/h
396.4 107.7 121.2
Volume of enclosure
m
3 0.423 0.122 0.077
Free air volume of enclosure
m
3 0.265 0.072 0.040
Air changes per minute 24.9 27.9 50.0
Hardware configuration:
▪ 100 mm duct connected to port on
top of enclosure
▪ Exhaust extraction cover kit
installed
Yes
Yes Yes
Yes Yes
Yes
Note:
The recommended extraction flow rate for iXM200, iXM600, iXM1200 is 180 m
3
/h.
Table 15
Worst case test results
Process gas
Chemical
name
Maximum
process
gas flow
(slm)
TLV/LEL
(ppm)*
25%
TLV/LEL
(ppm)
N
2
O re-
lease
rate
(slm)
Maximum
N
2
O de-
tected
outside
enclosure
(ppm)
ERC
(ppm) Pass/Fail†
Difluoromethane CH
2
F
2
0.2 1000 250 5 3 0.12 Pass
Methane CH
4
1 1000 250 5 3 0.60 Pass
Carbon Monox-
ide
CO 0.5 25 6.25 5 3 0.30 Pass
Hydrogen H
2
40 4000 1000 5 3 24.00 Pass
Nitrous Oxide N
2
O 15 50 12.5 5 3 9.00 Pass
10/2020 - ©Edwards Limited Page 23 M56635880_D
M56635880_D - Technical data