Edwards iXM Series, Instruction Manual

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Figure 3 Applications
2.3 Advanced control and monitoring
EdCentra is a scalable, networked sub-fab equipment fleet monitoring and data
acquisition tool. EdCentra's comprehensive data capture lets the user improve
operational efficiencies, through the:
▪ instantaneous monitoring of the equipment
▪ diagnostics functions such as historical trend analysis
▪ reporting on aggregated data
For advanced applications, we have a tool that allows the pumping system configuration
to be changed.
For some applications it can be necessary to adjust the system operating temperatures
to align with process demands. Contact your supplier to discuss the requirements and
refer to System operating temperature configuration on page 65 for instructions on
configuration.
Contact us for more information.
2.4 Green Mode
The Green Mode function decreases utility consumption of the system while on standby.
The Green Mode functionality is controlled with a PDT accessory or the tool through a
MicroTIM accessory. Refer to Accessories on page 93. Contact us for advice on
application and activation of the available accessories.
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M56635880_D - General description