Edwards iXM Series, Instruction Manual

Page: 96 / 104

13. Accessories
The accessories available for use with the iXM dry pump system are:
13.1 Disconnect box
The disconnect box ensures full compliance with SEMI S2 by providing true EMO
functionality and also provides interlock with photohelic switch.
Table 39
Disconnect box
Item
Item number
Photohelic switch and gauge kit A50803000
Power disconnect box Low iXM200 EL0103003
Power disconnect box Low iXM600 / 1200 EL0103004
Power disconnect box High iXM200 EL0103005
Power disconnect box High iXM600 / 1200 EL0103006
Power disconnect box Low iXM3000 A50802000
Power disconnect box High iXM3000 Contact supplier
13.2 Accessory modules
Two accessory modules are available for the iXM dry pump system. The Active Accessory
Module (AAM) gives connectivity for up to three directly connected accessories
including a gate valve, abatement and water flow sensor. It also gives connectivity for up
to two supported active accessories, two thermocouples and the pump status output.
The Passive Accessory Module (PAM) allows up to 3 accessories to be connected to the
accessory module interface.
An accessory module extension cable allows the AAM or PAM to be mounted up to 5 m
away from the dry pump system.
Table 40
Accessories modules
Accessory module
Item number
AAM D37480500
PAM D37480550
Accessory module extension cable (5.0 m) D37491502
13.3 Pump Display Terminal (PDT)
The PDT allows control and monitoring of the pump.
Table 41
PDT
Item
Item number
PDT D37280700
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M56635880_D - Accessories