Edwards iXM Series, Instruction Manual

Page: 98 / 104

13.8 Interface modules
13.8.1 MicroTIM
Tool specific control and monitoring via parallel interface (except for LAM-LON and
RS232 Micro-TIM's which are serial interface devices).
Table 46
Tool specific modules
MicroTIMs
Item number
SPI D37360310
MCM D37360320
TEL D37360330
E73 D37360340
LAM D37360350
C3 D37360360
Hitachi D37360370
eTIM D37361500
LON TP-1250* D37362000
EtherCAT®† D37363000
Configuration storage D37360390
RS232 D37370385
* For use with Lam 2300 platforms with LON communication.
† EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff
Automation GmbH, Germany.
13.8.2 EMS modules
Tool specific controlled stop interfaces.
Table 47 Tool specific EMS modules
EMS Modules
Item number
SPI D37370310
MCM D37370320
LAM D37370350
C3 D37370360
13.8.3 iGateway modules
The Pump LON to Ethernet iGateway and Serial to Ethernet iGateway give an additional
Ethernet connection to the Drypump. This is used for connection to an Edwards
Fabworks / EdCentra system or third party equipment using Semi E54.
The Pump-Serial to Pump-LON and Dual SIM Gateway connects to an Edwards Drypump.
This gives connections to support LON networks and components and two isolated
RS232 serial links with Edwards Serial Interface Module (SIM) protocol.
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