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EBARA
CORPORATION
10.4 Troubleshooting (4) Option
WARNING
Interrupt Earth Leakage Breaker (ELB) before starting on wiring and maintenance
work.
Do not switch on the power supply to the pump until work is completed.
WARNING
The pump casing and exhaust piping become extremely hot during operation and
for some time after stopping.
Be sure that pump and exhaust piping do not come in contact with humans or
inflammable substances.
Do not remove the pump cover during operation.
WARNING
Check for gas leaks after installing and maintaining the piping.
Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the ingress of air into the
pump. When checking for gas leaks by pressurization,
please pressurize by less than 0.05 MPa into the purge port and
do check.
Display
Symptom
Check Item
Corrective Action
Tube fittings are loosened.
Re-tighten.
ALARM:
WATER LEAKAGE
Water leakage
Instrument failure
Replace instrument.
Exhaust valve is closed.
Check exhaust pipe.
ALARM:
BACK PRESS. HIGH
Exhaust pressure
rises.
Exhaust pipe is clogged with
by products.
Check exhaust pipe.
ALARM:
EMERGENCY STOP
Emergency Stop
switch
Stop by emergency Stop
button.
Check that pump can be
operated and turn the
button head to release lock.
Connector of back pressure
sensor is not connected.
Connect back pressure
sensor connector.
WARN: BACK
PRESS. HIGH ##.#
Disconnection of
back pressure
sensor
Back pressure sensor failure Replace back pressure
sensor.
WARN: BACK PRESS
WIRE BROKE
Back press sensor is
broken
Instrument failure
Replace instrument.