(
71)
EBARA
CORPORATION
Abnormal symptom
Check Item
Corrective Action
Incorrect wiring
Check wiring.
Circuit breaker is activated.
(Leakage detector is on.)
Short circuit
Replace or overhaul pump.
No power supply to pump.
Check power supply.
Connector is not connected.
Connect power connector.
Power LED does not come
on.
ELB is not ON.
Place ELB to ON.
ELB is not ON.
Place ELB to ON.
Nothing appears on LCD
Instrument failure
Replace instruments.
WRONG SELECTION is
displayed on the display.
The rotary switch is not set correctly.
Adjust the rotary switch setting.
“Remote” mode has been selected.
Set switch to “Local” mode.
Start-up conditions are not satisfied.
(“Startfail” is displayed.)
Satisfy all start-up conditions.
The LCD Controller select switch is not
set correctly
Adjust the LCD controller select
setting.
MP does not start when
applying START button.
Instrument failure
Replace instrument.
“Local” mode has been selected.
Set switch to “Remote”.
“Alternate” mode has been selected.
(Pump jogs.)
Enter “Alternate” start signal input.
Set to “Momentary” mode.
MP does not start when
entering external “MP start”
signal input.
Instrument failure
Replace instrument.
BP start signal is not entered in
REMOTE mode.
Enter the start signal.
BP does not start.
Instrument failure
Replace instruments.
Adjustment feet are not applied.
Use the adjustment feet.
Some object is making contact with the
outer cover.
Remove the object.
The fastening screws of the outer corer
have worked themselves loose.
Tighten the fastening screws.
Abnormal noise
Excessive vibration
Parts of the pump are damaged.
Replace or overhaul pump.
Accumulation of by-products in pipes.
Clean piping.
N2 pressure setting is high.
Set pressure for correct value.
Leak from vacuum piping.
Check piping.
Accumulation of by-products in pumps.
Replace or overhaul pump.
Vacuum pressure increase.
The dilution N2 gas control valve has
been opened too much.
Adjust the N2 flow rate as
appropriate.
**MEMORY ERROR** is
displayed on LCD after
activating ELB or changing
the dip switch setting
None
Need “Countermeasure against
electric Noise” to pump.