(
40)
EBARA
CORPORATION
Fig. 6.3 How to set the operational mode
SET
CONTROL MODE?
SET
DIP SW?
SET BP
NORMAL SPEED
？
SET POINT
N2 FLOW LOW?
SET POINT
BACK PRES.?
▼
▲
BP : ##.# A
MP : ##.# A
PRG.
Press the
for 3 sec.
or more.
▼
▲
▼
▲
▼
▲
• Status display
• Setting the pump operation control mode
• Setting the DIP switch
• Setting the normal rotational speed of BP
• Setting the N2 flow low point
• Setting the WARNING value for the back pressure
Pressing the key PRG. for 3 sec. or more
when the status screen is displayed switches
to the operational mode setting screen.
When the mode you want to
set is displayed, press the
ENTER to go to the setting
change screen.
SET
RUNNING MODE
？
▼
▲
• Setting the pump running mode
SET BP
LOW SPEED
？
▼
▲
• Setting the low rotational speed of BP