(
64)
EBARA
CORPORATION
8.5 Spare (Maintenance) Parts List
Following parts are needed for maintenance in customers' site.
Table. 8.2
1. Standard consumption Part.
Parts Name
Type
EC Part No.
PFPE oil
BARRIERTA J100ES
C-0402-000-0111
2. Recommendable Part for Safe Operation.
Parts Name
Type
EC Part No.
NW40
C-1210-352-0001
O-ring (Viton A)
G55 (For Exh. check valve)
C-1210-089-0201
3. Recommendable Parts for Quick Maintenance.
Parts Name
Type
EC Part No.
Exhaust check valve
32X80L
C-2244-031-0001
4. Recommendable Spare Parts. (Not needed for each pump.)
Parts Name
Type
EC Part No.
Water flow sensor
20 L/min
C-5137-008-0001
N2 flow sensor
CME0101
C-5138-062-0111
N2 gas pressure regulator
R31-200-C121
C-2250-101-0001
(EC:EBARA CORPORATION, ETI:EBARA TECHNOLOGIES INCORPORATED)
Following labels are attached to pump covers. When they are hard to read for
discoloring or peeling off, please stick them again as directed in the Warning Label
drawings .
Table. 8.3 Labels
Label Name
Part No.
[DANGER]
HAZARDOUS WAIGHT DANGER LABEL
C-7110-316-0001
[WARNING]
HAZARDOUS VOLTAGE WARNING LABEL
C-7110-313-0001
[WARNING]
HIGH TEMPERATURE WARNING LABEL
C-7110-312-0001
[WARNING]
HAZARDOUS MATERIAL WARNING LABEL
C-7110-314-0001
[CAUTION]
CHARGE MARK LABEL
C-7110-315-0001