EBARA ESA300W, Instruction Manual, Page: 22 / 80

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20)
EBARA
CORPORATION
Fig. 3.1 Performance Curves
1
10
100
1000
10000
100000
0.1 1 10 100 1000 10000 100000
PUMP INLET PRESSURE (Pa)
PUMPING S
P
EED (L/min)
ESA300W
ESA300W-H
[50Hz]
10
5
10
4
10
3
10
2
10
1
10
0
10
-1
10
0
10
1
10
2
10
3
10
4
10
5
Fig. 3.2 Performance Curves
1
10
100
1000
10000
100000
0.1 1 10 100 1000 10000 100000
PUMP INLET PRESSURE (Pa)
PUM
P
ING SPE
E
D
(L/m
in)
ESA300W
ESA300W-H
[60Hz]
10
5
10
4
10
3
10
2
10
1
10
0
10
-1
10
0
10
1
10
2
10
3
10
4
10
5