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56)
EBARA
CORPORATION
8. Maintenance and Inspection
8.1 Internal energies
Following items show internal energies that shall be considered before start
service maintenance.
8.1.1 Power source
This dry pump is supplied with AC200V/AC400V/AC460V power source. Aside
from the pump, the accessory power source locating in the vicinity of the power
connectors are supplied with voltage even when the pump is completely stopped.
To conduct pump maintenance or service, be sure to keep the power supply to the
pump turned off and lock-outed and then unplug the power cable.
8.1.2 Cooling water
This dry pump is supplied with cooling water at pressure of maximum 0.4 MPa.
Disconnection of the cooling water resulted from improper handling may cause
electrification and unit damage. For service and transportation, unplug the cooling
water connection plugs on the inlet and outlet, and seal off with plastic cap. The
self-sealing plug is used for the cooling water connection plug in these pumps.
8.1.3 Nitrogen gas
This dry pump is supplied with nitrogen gas at pressure of maximum 0.7 MPa for
diluting and sealing inside the pump. For service and transportation, close the
supply-source valve to reduce the pressure with the regulator and detach the gas
connection. Close nitrogen port with blank off plug. If the pump has already
operated with process gases, purge the residual gases with nitrogen gas after
stopping the pump operation. Then, conduct maintenance.