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5)
EBARA
CORPORATION
CAUTION
Never operate the pump without pump cover for safety.
Page 1: ...0Hz Caution Please read and understand this INSTRUCTION MANUAL thoroughly before using this equipment Be sure to keep this INSTRUCION MANUAL on hand for future reference To Facility and Tool Manufactu...
Page 2: ...this manual without permission Manufacturer reserves the right to discontinue or change any specifications or designs without notice and without incurring obligations Model OOO in this catalog is our...
Page 3: ...te harmony between technology and nature prevent environmental pollution and improve the overall results of our environmental management activities We are aware that environmental protection and manag...
Page 4: ...tor should read through this instruction manual and other documents issued by EBARA in detail If you have any questions on pump operation safety or maintenance please does not hesitate to contact EBAR...
Page 5: ...tch on the power supply to the pump until work is completed and pump and piping are returned to safe operating condition WARNING Supply N2 gas to the exhaust piping when necessary to dilute the flamma...
Page 6: ...sure that pump and exhaust piping do not come in contact with humans or inflammable substances Do not remove pump enclosure panels during operation WARNING Check Safety Interlock functions periodical...
Page 7: ...5 EBARA CORPORATION CAUTION Never operate the pump without pump cover for safety...
Page 8: ...rface may burn or cause injury Allow the piping and casing to cool before servicing 2 Hazardous voltage warning Hazardous Voltage may shock burn or cause death Turn power off and lockout before servic...
Page 9: ...pump Raise all adjuster feet fully when moving WARNING Hazardous Materials Exposure to air may cause spontaneous fire or explosion Inhalation or skin absorption will cause severe injury or death by po...
Page 10: ...f the warranty beyond the original period For repairs not covered under this Warranty EBARA will charge the customer for parts and labor Exclusions and Limitations This Warranty does not cover the fol...
Page 11: ...3 2 Control System 14 3 2 1 Warning 14 3 2 2 Operation Status Control 15 3 3 The way of pump moving 15 3 3 1 Preparation 15 3 3 2 Moving method 16 3 4 Detailed Specifications 17 4 Installation 22 4 1...
Page 12: ...Starting stopping the pump with the LCD controller 49 7 Operation 50 7 1 Before Starting 50 7 2 START STOP 52 7 2 1 LOCAL Pump Side Start Stop 53 7 2 2 REMOTE Start Stop 54 7 2 3 COMMUNICATION Start S...
Page 13: ...ed 2 Introduction 2 1 Introduction Check the following items on receipt of the pump package 1 Check that the nameplate affixed to the outer cover of the pump to confirm that the pump supplied agrees w...
Page 14: ...cally to operate the unit efficiently 3 To dispose the unit follow effective laws and ordinances applicable in the area where the unit is installed 4 To dispose the lubricant oil and chemicals follow...
Page 15: ...mful level Properly connect the nitrogen gas line to the purge port provided according to the instructions in Table 3 1 and the descriptions in Section 4 2 3 In the cases the gas concentration may bec...
Page 16: ...condition of each utility and pump section During pump operation all operating conditions are monitored including power supply cooling water flow N2 gas flow and motor coil temperature motor speed an...
Page 17: ...RR A AA AAS series based on SEMI standard E73 3 2 2 Operation Status Control The sensor data are displayed on the LCD display provided on the controller to facilitate operation status control and dail...
Page 18: ...o persons shall move the pump by pushing its terminal portion alternately as directed below If pump needs to be moved on steps or ditches spread steel plate or the like which can sustain the pump weig...
Page 19: ...4 Tube Fitting Same as Swagelock or equivalent N2 Pressure Supply 0 15 0 7Mpa Gas Gauge Press Setting 0 09 0 12Mpa Approx Flow rate 7 5 10 5 Pam3 s 78 82 Pam3 s Duct Connection d50 mm L50 mm Venti Pr...
Page 20: ...18 EBARA CORPORATION...
Page 21: ...19 EBARA CORPORATION...
Page 22: ...ET PRESSURE Pa PUMPING SPEED L min ESA300W ESA300W H 50Hz 105 104 103 102 101 100 10 1 100 101 102 103 104 105 Fig 3 2 Performance Curves 1 10 100 1000 10000 100000 0 1 1 10 100 1000 10000 100000 PUMP...
Page 23: ...1 Pressure Gauge P Regulator N2 Gas Motor 1 Main Pump MP Booster Pump BP Control LCD Controller Motor Starter 2 Motor 2 Control Circuit Driver Cooling Water Flow Sensor FT2 Water Silencer Earth Leakag...
Page 24: ...e pump the distance between pump and interface box shall be 3m or less CAUTION Install pump in a location at an ambient not exceeding 30 Particular caution is required when the pump is operated in an...
Page 25: ...lace objects on it 1 Turn the holding nuts in the clockwise direction to lower the height adjustment feet and secure the pump 2 Adjust the height of the feet evenly to ensure that the pump base is lev...
Page 26: ...r may be installed c The weight of the pipes attached to the pump can cause misalignment and leaks from the flange connections Be sure therefore to support the piping properly and not to apply undue f...
Page 27: ...tee Turbidity pH Alkalinity CaCO3 Hardness CaCO3 Evaporation residue Chlorine ion Iron Manganese ppm ppm ppm ppm ppm ppm ppm 20 6 5 8 0 75 120 250 80 0 3 0 2 Correct Wrong Socket Plug In Out Marking S...
Page 28: ...when water droplets can be detected on the outer surface of the pump cooling water piping as this suggests the possibility of dew condensation in the pump 4 2 3 N2 Gas Piping Cut tube at right angles...
Page 29: ...to ventilate through the ventilation duct when the pump is used to exhaust toxic and or inflammable gases Do not combine the ventilation duct with the pump exhaust piping CAUTION Even when the pump is...
Page 30: ...rrent This product is equipped with a cord having a grounding wire with an appropriate grounding plug The plug must be plugged into an outlet that is property installed and grounded in accordance with...
Page 31: ...tor for the main power supply Fig 4 4 and Tables 4 2 and 4 3 show the connector pin assignment A B C ELB Table 4 2 Pin Assignment of Power Supply Terminal Block No Phase A R B S C T D GND Earth Bar Fi...
Page 32: ...e Female Receptacle As seen from connecting side Table 4 5 Control Connector Pin Assignment CN Z Pin No Signal name I O Signal type 1 MP START STOP IN Run CLOSE Alternate 2 BP START STOP IN Run CLOSE...
Page 33: ...TATUS OUT Abnormality CLOSE Alternate 2 8 RESERVED OUT 9 SAVING ENERGY STATUS OUT SAVE ENERGY MODE CLOSE 10 BACK PRESSURE HIGH WARNING STATUS 1 OUT Abnormality CLOSE Alternate 2 11 RESERVED OUT 12 RES...
Page 34: ...Y Signal Contacts Input Signal 12VDC 1k Open Collector Pump side Circuit Customer s connection Dry Contact 10mA Min Output Signal 100mA Max Pump side Circuit Customer s connection Open Collector 4VDC...
Page 35: ...t signals are used to energize an inductive load such as a relay be sure to insert a diode 100V 1A class in order to absorb the back electromotive force due to surge currents 5 Power Supply for the Op...
Page 36: ...ication RESET For resetting WARNING and ALARM BZ OFF For buzzer mute in WARNING ALARM PRG For changing screen of pump status and change hierarchy of screen ENTER For using at DIP switch selection And...
Page 37: ...4 Pump unit No P U M P T Y P E 5 Pump model Voltage O P E T I M E 6 Total operation time h B A C K P R E S S U R E 7 Back pressure option k P a P U M P N 2 F L O W 8 Pump N2 gas flow P a m 3 s W A T...
Page 38: ...o the electrical power and motor rotation speed indication when no operation takes place after the lapse of 1 minute 6 Use the Display Select Switch to change the display The WARNINGs ALARMs that have...
Page 39: ...water flow Casing temp Motor speed 002 51 00 020901 12 25 26 Occurrence date History No The lower number is newer Analog value Alarm 2nd code Alarm 1st code How to read the alarm history See Table 6 2...
Page 40: ...rotection activated OC 66 01 BP driver inner temp 25 04 BP driver protection activated OV 66 02 Inner communication error BP driver 26 02 BP driver protection activated OH1 66 04 Inner communication e...
Page 41: ...mode SET RUNNING MODE Switches the running modes NORMAL and S ENERGY Setting the rotational speed in the NORMAL mode SET BP NORMAL SPEED Sets the pump rotational speed in the NORMAL mode Setting the r...
Page 42: ...the DIP switch Setting the normal rotational speed of BP Setting the N2 flow low point Setting the WARNING value for the back pressure Pressing the key PRG for 3 sec or more when the status screen is...
Page 43: ...mode that is currently not set is displayed If you do not need to set press PRG key to go back to the previous screen 6 3 2 Setting the DIP switch See 6 4 for details of the DIP switch SET CONTROL MO...
Page 44: ...min 1 Decrease the setting speed by 0 1 kmin 1 Upper limit BP 6 0 kmin 1 Lower limit BP 3 0 kmin 1 Factory Setting 6 0 kmin 1 6 3 5 Setting the low rotational speed Use the up and down arrow keys to c...
Page 45: ...ue for WARNING set value 1 0 Pam3 s 6 3 7 Setting the WARNING value for the back pressure option Use the up and down arrow keys to change the setting value Increase the setting value by 0 5 kPa Decrea...
Page 46: ...Remote Automatic operation External signal input OFF Optional Table 6 6 Dip Switch B Settings No Mode Off On Factory setting 1 2 3 4 5 6 Remote Interface IF Exclusive special IF No use standard IF ON...
Page 47: ...l or PUMP STOP Regardless of External Signal PUMP STOP NOTE Dip switch A No 3 BUZZER and toggle for select Local Remote switch can change always When parameter setting of the dip switches other than d...
Page 48: ...face default DIP SW B No 7 Selects the detection method for phase loss in the power source DIP SW B No 8 Locks or unlocks the currently selected operation status display which usually returns to the p...
Page 49: ...UT Dip switch No MODE OFF ON 1 B1 NO ASSIGNED B1 NO ASSIGNED 2 B2 NO ASSIGNED B2 NO ASSIGNED 3 B3 NO ASSIGNED B3 NO ASSIGNED 4 B4 NO ASSIGNED B4 NO ASSIGNED 5 B5 NO ASSIGNED B5 NO ASSIGNED 6 Remote In...
Page 50: ...ip and alarm BZ OFF This switches the dip switch numbers This sets the selected dip switch ON This sets the selected dip switch OFF ENTER This indicates the next page of the display DIP Switch A DIP S...
Page 51: ...6 6 Starting stopping the pump with the LCD controller Maximum two LCD controllers can be connected Note only one of them can start and stop the pump the other shows the pump operational statuses The...
Page 52: ...sure gauge pressure to 0 1 MPa first Then press the red stopper to lock the knob in position WARNING Unless a sufficient supply of N2 gas is maintained serious problems will occur such as oil back flo...
Page 53: ...isplay appears on the LCD controller or when any abnormal symptoms are found other than the display take action in accordance with 10 Troubleshooting Even when the cause of the ALARM WARNING display h...
Page 54: ...AUTION When the production process leads to react by products in the pump or when the process handles corrosive gases be sure not to stop the pump until after at least 30 minutes of stopping the proce...
Page 55: ...the START button on the controller The Main Pump MP will start and the M P RUN lamp on the controller will light After this the Booster Pump BP will start automatically and the B P RUN lamp on the con...
Page 56: ...the display during pump operation For other status display indications refer to Table 6 1 NOTE The pump will not start when an ALARM WARNING has been generated When a START signal is entered STARTFAIL...
Page 57: ...tart command to the communication connector The power is indicated on the display during pump operation For other status display indications refer to Table 6 1 NOTE The pump will not start when an ALA...
Page 58: ...water at pressure of maximum 0 4 MPa Disconnection of the cooling water resulted from improper handling may cause electrification and unit damage For service and transportation unplug the cooling wate...
Page 59: ...exhaust piping will remain at a high temperature during operation and for a short time after the pump has stopped Be sure to avoid contact and keep inflammable substances out of reach Do not remove th...
Page 60: ...ycle CAUTION When a ALARM signal has been generated in the REMOTE operating mode do not start the maintenance tasks until you have interrupted the external start signal When the external ALTERNATE sta...
Page 61: ...of air into the pump When checking for gas leaks by pressurization please pressurize by less than 0 05 MPa into the purge port and do check Toxic gases may be generated from by products in the piping...
Page 62: ...ssure The chamber containing the oil is under low pressure vacuum so that a significant leak will occur causing substantial damage to the pump when the oil filling plug is removed with the pump operat...
Page 63: ...8 3 4 After you have checked that there are no depositions and fragments adhering to the O ring attached to the plug close the oil filler inlet 5 Fit a waste oil container PVC bag to the bottom of th...
Page 64: ...d oil drain port positions Fig 8 3 Oil Level Switch Top line Bottom line Oil drain hole Oil drain hole Oil drain hole Oil drain hole Oil filler inlet Oil filler inlet Oil filler inlet Oil filler inlet...
Page 65: ...When the lubrication oil level exceeds the upper limit the oil may leak to the pump side Thus be sure not to exceed the upper limit line when adding the oil CAUTION When the lubrication oil level is...
Page 66: ...needed for each pump Parts Name Type EC Part No Water flow sensor 20 L min C 5137 008 0001 N2 flow sensor CME0101 C 5138 062 0111 N2 gas pressure regulator R31 200 C121 C 2250 101 0001 EC EBARA CORPO...
Page 67: ...al regulations in each area Table 8 4 List of wastes during maintenance Part Equipped on Remarks Lubricant oil Inside of pump module See section 8 4 Refer to Appendix 1 2 or Material Safety Data Sheet...
Page 68: ...se factories equip special tools sufficient evacuation duct Contact EBARA Sales office or Overhaul service center for detail To avoid dangers potentially encountered during pump overhauls follow instr...
Page 69: ...e values specified using appropriate measurement equipment Without assurance of gas safety instruct the workers to wear proper personnel protective equipment if necessary to protect them from gas haza...
Page 70: ...e underneath the suspended pump WARNING For lifting the pump use only qualified operator personnel Be sure that the wire rope and crane used for lifting the pump are in proper order and match the weig...
Page 71: ...g the adjustment feet Place a protective cloth around the pump to avoid shock and position protective members between the outer cover and the wires in order to distribute the load of the fastening wir...
Page 72: ...ation and for some time after stopping Be sure that pump and exhaust piping do not come in contact with humans or inflammable substances Do not remove the pump cover during operation WARNING Check for...
Page 73: ...ote Alternate mode has been selected Pump jogs Enter Alternate start signal input Set to Momentary mode MP does not start when entering external MP start signal input Instrument failure Replace instru...
Page 74: ...some time after stopping Be sure that pump and exhaust piping do not come in contact with humans or inflammable substances Do not remove the pump cover during operation WARNING Check for gas leaks af...
Page 75: ...motor coil temp rises Main Pump MP motor coil temp rises Motor failure Replace or overhaul pump Connection error of the instrumented units Check the connection of the instrumented unit WARN BP COMM E...
Page 76: ...xhaust piping become extremely hot during operation and for some time after stopping Be sure that pump and exhaust piping do not come in contact with humans or inflammable substances Do not remove the...
Page 77: ...MOTOR STEP OUT Booster Pump BP motor step out Instrument failure Replace instrument Insufficient ventilation Ventilate sufficiently Cooling water flow rate is reduced Cool pump thoroughly and reset A...
Page 78: ...ARM signal still remains the ALARM display will appear again even after you have reset During REMOTE operation carry out the above procedures after you have turned off the external start signal When t...
Page 79: ...he pump When checking for gas leaks by pressurization please pressurize by less than 0 05 MPa into the purge port and do check Display Symptom Check Item Corrective Action Tube fittings are loosened R...
Page 80: ...ARM signal still remains the ALARM display will appear again even after you have reset During REMOTE operation carry out the above procedures after you have turned off the external start signal When t...
