EBARA ESA300W, Instruction Manual, Page: 40 / 80

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EBARA
CORPORATION
Table 6.2 Alarm code list
Code Code
ALARM name
1st
code
2nd
code
WARNING name
1st
code
2nd
code
MP motor temp. 51 00 Low Pump N2 18 01
BP motor temp. 52 00 BP motor temp. 23 00
BP overload 1(Thermal) 54 00 MP motor temp. 24 00
MP overload 1(Thermal) 55 00 High back pressure ( ▲ ) 21 01
MP No Current 60 00 Back pressure sensor damaged( ▲ ) 21 02
Phase Error 64 00 Control board inner temp. 13 00
BP step out 69 00 BP driver case temp. 25 02
BP driver protection activated (OC) 66 01 BP driver inner temp. 25 04
BP driver protection activated (OV) 66 02 Inner communication error (BP driver) 26 02
BP driver protection activated (OH1) 66 04 Inner communication error (IO) 26 03
BP driver protection activated (OH2) 66 05 Low cooling water 00 01
BP driver protection activated (CPF) 66 06 BP over current 31 14
BP driver protection activated (UV) 66 07
BP driver protection activated (STA) 66 08
BP driver protection activated (DRE) 66 09
Water leakage ( ▲ ) 53 00
High back pressure ( ▲ ) 63 00
Emergency stop (EMO) ( ▲ ) 71 00
Low cooling water 73 00
BP over load2 67 00
Ext. interlock ( ▲ ) 74 00
BP over current 81 03
“ ▲ ” indicates that the item is optional.