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EBARA
CORPORATION
8.3 Vacuum and Exhaust Piping
WARNING
Maintenance on the vacuum and exhaust piping shall be performed by taking
proper action to avoid the dispersion of inflammable, toxic and/or hazardous
substances and to prevent physical contact with, and absorption of, these
substances.
WARNING
The pump and exhaust piping will remain at a high temperature during
operation and for a short time after the pump has stopped.
Be sure to avoid contact and keep inflammable substances out of reach.
Do not remove the outer cover during operation.
WARNING
Be sure to check for gas leaks after you have finished pipe
maintenance work. Leaks will cause serious danger due to the
discharge of harmful and hazardous substances and the
occurrence of unpredictable reactions associated with the
admission of air into the pump. When checking for gas leaks by
pressurization, please pressurize by less than 0.05 MPa into the
purge port and
do check.
Toxic gases may be generated from by-products in the piping or pump in pump
disconnection from the tool piping for repair and replacement or flange removal for
maintenance. Gain relevant information about the process gases from your tool suppliers,
and be sure that the gas concentrations in the work areas are at quarter or under the
acceptable values specified using appropriate measurement equipment.
Without assurance of gas safety, instruct the workers to wear proper personnel
protective equipment if necessary to protect them from gas hazards. The
personnel protective equipment must include at least gloves, safety goggles, and a
gas mask.
Be sure to following the instructions below when carrying out maintenance work
on the vacuum and exhaust piping of the pump.
(1) Before you remove and wash the piping, be sure to purge with a sufficient
volume of N2 gas.