Safety
Atmospheric Single-Arm Robot
Regulatory Compliance
User’s Manual
Brooks Automation
2-2
Revision 1
Regulatory Compliance
These safety recommendations are basic guidelines. If the facility where the Atmospheric Sin-
gle-Arm Robot is installed has additional safety guidelines they should be followed as well,
along with the applicable national and international safety codes.
To determine if the product is CE compliant, check for the CE mark on the product. If
necessary, request the official Declaration of Conformity (DOC) from Brooks Auto-
mation. The product is also S2 compliant. If necessary, request a copy of the Third
Party Certificate of Compliance (COC) from Brooks Automation.
In addition to this section, other sections may include regulatory information.
Note that the nickelcoated robots are CE and SEMI S2 compliant, but the black-anod-
ized robots are not.
There are no ergonomic or human factor requirements for a robot.
The robot is intended to be integrated into an end-user system. If the robot is used in
a manner not specified by Brooks Automation, the protection provided by the robot
assembly is compromised.
Table 2-1: Safety Agencies
Approval of Safety Agencies
This equipment has been examined for
user safety and complies with the
regulations set by the following
organizations:
CE (Conformité Européenne) - The
European safety requirements
• Machinery Directive
• LVD Directive
• EMC Directive
Semiconductor Equipment and Mate-
rials International (SEMI)
Safety Guidelines for Semiconductor
Manufacturing Equipment (the SEMI S2
and S13 Guidelines).
CDRH Chapter 21 CFR, Subsection J
Laser safety requirements applicable on
its date of manufacture.
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